Mask-Moving-Lithography-Based High-Precision Surface Fabrication Method for Microlens Arrays
Microlens arrays, as typical micro-optical elements, effectively enhance the integration and performance of optical systems. The surface shape errors and surface roughness of microlens arrays are the main indicators of their optical characteristics and determine their optical performance. In this st...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2024-02-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/15/2/289 |
| _version_ | 1797297514173431808 |
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| author | Jianwen Gong Ji Zhou Junbo Liu Song Hu Jian Wang Haifeng Sun |
| author_facet | Jianwen Gong Ji Zhou Junbo Liu Song Hu Jian Wang Haifeng Sun |
| author_sort | Jianwen Gong |
| collection | DOAJ |
| description | Microlens arrays, as typical micro-optical elements, effectively enhance the integration and performance of optical systems. The surface shape errors and surface roughness of microlens arrays are the main indicators of their optical characteristics and determine their optical performance. In this study, a mask-moving-projection-lithography-based high-precision surface fabrication method for microlens arrays is proposed, which effectively reduces the surface shape errors and surface roughness of microlens arrays. The pre-exposure technology is used to reduce the development threshold of the photoresist, thus eliminating the impact of the exposure threshold on the surface shape of the microlens. After development, the inverted air bath reflux method is used to bring the microlens array surface to a molten state, effectively eliminating surface protrusions. Experimental results show that the microlens arrays fabricated using this method had a root mean square error of less than 2.8%, and their surface roughness could reach the nanometer level, which effectively improves the fabrication precision for microlens arrays. |
| first_indexed | 2024-03-07T22:21:24Z |
| format | Article |
| id | doaj.art-fb1b7b89e4d84866a4f1729d4e09d139 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-07T22:21:24Z |
| publishDate | 2024-02-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-fb1b7b89e4d84866a4f1729d4e09d1392024-02-23T15:27:55ZengMDPI AGMicromachines2072-666X2024-02-0115228910.3390/mi15020289Mask-Moving-Lithography-Based High-Precision Surface Fabrication Method for Microlens ArraysJianwen Gong0Ji Zhou1Junbo Liu2Song Hu3Jian Wang4Haifeng Sun5Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, ChinaInstitute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, ChinaInstitute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, ChinaInstitute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, ChinaInstitute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, ChinaInstitute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, ChinaMicrolens arrays, as typical micro-optical elements, effectively enhance the integration and performance of optical systems. The surface shape errors and surface roughness of microlens arrays are the main indicators of their optical characteristics and determine their optical performance. In this study, a mask-moving-projection-lithography-based high-precision surface fabrication method for microlens arrays is proposed, which effectively reduces the surface shape errors and surface roughness of microlens arrays. The pre-exposure technology is used to reduce the development threshold of the photoresist, thus eliminating the impact of the exposure threshold on the surface shape of the microlens. After development, the inverted air bath reflux method is used to bring the microlens array surface to a molten state, effectively eliminating surface protrusions. Experimental results show that the microlens arrays fabricated using this method had a root mean square error of less than 2.8%, and their surface roughness could reach the nanometer level, which effectively improves the fabrication precision for microlens arrays.https://www.mdpi.com/2072-666X/15/2/289microlens arrayspre-exposure technologyinverted air bath reflux method |
| spellingShingle | Jianwen Gong Ji Zhou Junbo Liu Song Hu Jian Wang Haifeng Sun Mask-Moving-Lithography-Based High-Precision Surface Fabrication Method for Microlens Arrays Micromachines microlens arrays pre-exposure technology inverted air bath reflux method |
| title | Mask-Moving-Lithography-Based High-Precision Surface Fabrication Method for Microlens Arrays |
| title_full | Mask-Moving-Lithography-Based High-Precision Surface Fabrication Method for Microlens Arrays |
| title_fullStr | Mask-Moving-Lithography-Based High-Precision Surface Fabrication Method for Microlens Arrays |
| title_full_unstemmed | Mask-Moving-Lithography-Based High-Precision Surface Fabrication Method for Microlens Arrays |
| title_short | Mask-Moving-Lithography-Based High-Precision Surface Fabrication Method for Microlens Arrays |
| title_sort | mask moving lithography based high precision surface fabrication method for microlens arrays |
| topic | microlens arrays pre-exposure technology inverted air bath reflux method |
| url | https://www.mdpi.com/2072-666X/15/2/289 |
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