Mask-Moving-Lithography-Based High-Precision Surface Fabrication Method for Microlens Arrays

Mask-Moving-Lithography-Based High-Precision Surface Fabrication Method for Microlens Arrays

Microlens arrays, as typical micro-optical elements, effectively enhance the integration and performance of optical systems. The surface shape errors and surface roughness of microlens arrays are the main indicators of their optical characteristics and determine their optical performance. In this st...

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Bibliographic Details
Main Authors:	Jianwen Gong, Ji Zhou, Junbo Liu, Song Hu, Jian Wang, Haifeng Sun
Format:	Article
Language:	English
Published:	MDPI AG 2024-02-01
Series:	Micromachines
Subjects:	microlens arrays pre-exposure technology inverted air bath reflux method
Online Access:	https://www.mdpi.com/2072-666X/15/2/289

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