Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach
The recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based on microhotplates fabricated with micro-electro-mechanical system (MEMS) technology dominate the market due to their b...
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| Format: | Article |
| Language: | English |
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MDPI AG
2018-10-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/9/11/557 |
| _version_ | 1818026819850338304 |
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| author | Haotian Liu Li Zhang King Ho Holden Li Ooi Kiang Tan |
| author_facet | Haotian Liu Li Zhang King Ho Holden Li Ooi Kiang Tan |
| author_sort | Haotian Liu |
| collection | DOAJ |
| description | The recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based on microhotplates fabricated with micro-electro-mechanical system (MEMS) technology dominate the market due to their balance in performance and cost. Integrating sensors with signal conditioning circuits on a single chip can significantly reduce the noise and package size. However, the fabrication process of MEMS sensors must be compatible with the complementary metal oxide semiconductor (CMOS) circuits, which imposes restrictions on the materials and design. In this paper, the sensing mechanism, design and operation of these sensors are reviewed, with focuses on the approaches towards performance improvement and CMOS compatibility. |
| first_indexed | 2024-12-10T04:38:04Z |
| format | Article |
| id | doaj.art-fb2cbaf223d349158318fa9032935f33 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-12-10T04:38:04Z |
| publishDate | 2018-10-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-fb2cbaf223d349158318fa9032935f332022-12-22T02:01:58ZengMDPI AGMicromachines2072-666X2018-10-0191155710.3390/mi9110557mi9110557Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic ApproachHaotian Liu0Li Zhang1King Ho Holden Li2Ooi Kiang Tan3School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore 639798, SingaporeTemasek Laboratories, Nanyang Technological University, Singapore 67905910, SingaporeSchool of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore 639798, SingaporeSchool of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 67905367, SingaporeThe recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based on microhotplates fabricated with micro-electro-mechanical system (MEMS) technology dominate the market due to their balance in performance and cost. Integrating sensors with signal conditioning circuits on a single chip can significantly reduce the noise and package size. However, the fabrication process of MEMS sensors must be compatible with the complementary metal oxide semiconductor (CMOS) circuits, which imposes restrictions on the materials and design. In this paper, the sensing mechanism, design and operation of these sensors are reviewed, with focuses on the approaches towards performance improvement and CMOS compatibility.https://www.mdpi.com/2072-666X/9/11/557gas sensormetal oxide (MOX) sensormicro-electro-mechanical system (MEMS)microhotplate |
| spellingShingle | Haotian Liu Li Zhang King Ho Holden Li Ooi Kiang Tan Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach Micromachines gas sensor metal oxide (MOX) sensor micro-electro-mechanical system (MEMS) microhotplate |
| title | Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach |
| title_full | Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach |
| title_fullStr | Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach |
| title_full_unstemmed | Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach |
| title_short | Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach |
| title_sort | microhotplates for metal oxide semiconductor gas sensor applications towards the cmos mems monolithic approach |
| topic | gas sensor metal oxide (MOX) sensor micro-electro-mechanical system (MEMS) microhotplate |
| url | https://www.mdpi.com/2072-666X/9/11/557 |
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