Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach

Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach

The recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based on microhotplates fabricated with micro-electro-mechanical system (MEMS) technology dominate the market due to their b...

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Bibliographic Details
Main Authors:	Haotian Liu, Li Zhang, King Ho Holden Li, Ooi Kiang Tan
Format:	Article
Language:	English
Published:	MDPI AG 2018-10-01
Series:	Micromachines
Subjects:	gas sensor metal oxide (MOX) sensor micro-electro-mechanical system (MEMS) microhotplate
Online Access:	https://www.mdpi.com/2072-666X/9/11/557

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