High-Performance SAW Resonator with Spurious Mode Suppression Using Hexagonal Weighted Electrode Structure
Surface acoustic wave resonators are widely applied in electronics, communication, and other engineering fields. However, the spurious modes generally present in resonators can cause deterioration in device performance. Therefore, this paper proposes a hexagonal weighted structure to suppress them....
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| Format: | Article |
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MDPI AG
2023-12-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/23/24/9895 |
| _version_ | 1797379396559962112 |
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| author | Yulong Liu Hongliang Wang Feng Zhang Luhao Gou Shengkuo Zhang Gang Cao Pengcheng Zhang |
| author_facet | Yulong Liu Hongliang Wang Feng Zhang Luhao Gou Shengkuo Zhang Gang Cao Pengcheng Zhang |
| author_sort | Yulong Liu |
| collection | DOAJ |
| description | Surface acoustic wave resonators are widely applied in electronics, communication, and other engineering fields. However, the spurious modes generally present in resonators can cause deterioration in device performance. Therefore, this paper proposes a hexagonal weighted structure to suppress them. With the construction of a finite element resonator model, the parameters of the interdigital transducer (IDT) and the area of the dummy finger weighting are determined. The spurious waves are confined within the dummy finger area, whereas the main mode is less affected by this structure. To verify the suppression effect of the simulation, resonators with conventional and hexagonal weighted structures are fabricated using the micro-electromechanical systems (MEMS) process. After the S-parameter test of the prepared resonators, the hexagonal weighted resonators achieve a high level of spurious mode suppression. Their properties are superior to those of the conventional structure, with a higher Q value (10,406), a higher minimum return loss (25.7 dB), and a lower ratio of peak sidelobe (19%). This work provides a feasible solution for the design of SAW resonators to suppress spurious modes. |
| first_indexed | 2024-03-08T20:22:38Z |
| format | Article |
| id | doaj.art-fb5ee90c6f03447fb9b5fd6ef7ebe786 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-08T20:22:38Z |
| publishDate | 2023-12-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-fb5ee90c6f03447fb9b5fd6ef7ebe7862023-12-22T14:41:35ZengMDPI AGSensors1424-82202023-12-012324989510.3390/s23249895High-Performance SAW Resonator with Spurious Mode Suppression Using Hexagonal Weighted Electrode StructureYulong Liu0Hongliang Wang1Feng Zhang2Luhao Gou3Shengkuo Zhang4Gang Cao5Pengcheng Zhang6National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, ChinaNational Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, ChinaNational Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, ChinaNational Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, ChinaNational Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, ChinaNational Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, ChinaNational Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, ChinaSurface acoustic wave resonators are widely applied in electronics, communication, and other engineering fields. However, the spurious modes generally present in resonators can cause deterioration in device performance. Therefore, this paper proposes a hexagonal weighted structure to suppress them. With the construction of a finite element resonator model, the parameters of the interdigital transducer (IDT) and the area of the dummy finger weighting are determined. The spurious waves are confined within the dummy finger area, whereas the main mode is less affected by this structure. To verify the suppression effect of the simulation, resonators with conventional and hexagonal weighted structures are fabricated using the micro-electromechanical systems (MEMS) process. After the S-parameter test of the prepared resonators, the hexagonal weighted resonators achieve a high level of spurious mode suppression. Their properties are superior to those of the conventional structure, with a higher Q value (10,406), a higher minimum return loss (25.7 dB), and a lower ratio of peak sidelobe (19%). This work provides a feasible solution for the design of SAW resonators to suppress spurious modes.https://www.mdpi.com/1424-8220/23/24/9895surface acoustic wave (SAW)hexagonal weighted resonatorhigh Q valuesuppress spurious modesMEMS process |
| spellingShingle | Yulong Liu Hongliang Wang Feng Zhang Luhao Gou Shengkuo Zhang Gang Cao Pengcheng Zhang High-Performance SAW Resonator with Spurious Mode Suppression Using Hexagonal Weighted Electrode Structure Sensors surface acoustic wave (SAW) hexagonal weighted resonator high Q value suppress spurious modes MEMS process |
| title | High-Performance SAW Resonator with Spurious Mode Suppression Using Hexagonal Weighted Electrode Structure |
| title_full | High-Performance SAW Resonator with Spurious Mode Suppression Using Hexagonal Weighted Electrode Structure |
| title_fullStr | High-Performance SAW Resonator with Spurious Mode Suppression Using Hexagonal Weighted Electrode Structure |
| title_full_unstemmed | High-Performance SAW Resonator with Spurious Mode Suppression Using Hexagonal Weighted Electrode Structure |
| title_short | High-Performance SAW Resonator with Spurious Mode Suppression Using Hexagonal Weighted Electrode Structure |
| title_sort | high performance saw resonator with spurious mode suppression using hexagonal weighted electrode structure |
| topic | surface acoustic wave (SAW) hexagonal weighted resonator high Q value suppress spurious modes MEMS process |
| url | https://www.mdpi.com/1424-8220/23/24/9895 |
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