Structure Modification, Evolution, and Compositional Changes of Highly Conductive La:BaSnO<sub>3</sub> Thin Films Annealed in Vacuum and Air Atmosphere
Perovskite-type La:BaSnO<sub>3</sub> (LBSO) has been drawing considerable attention due to its high electron mobility and optical transparency. Its thin film electrical properties, however, remain inferior to those of single crystals. This work investigates the thermal post-treatment pro...
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MDPI AG
2022-07-01
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| Series: | Nanomaterials |
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| Online Access: | https://www.mdpi.com/2079-4991/12/14/2408 |
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| author | Tomas Murauskas Virgaudas Kubilius Rimantas Raudonis Martynas Skapas Valentina Plausinaitiene |
| author_facet | Tomas Murauskas Virgaudas Kubilius Rimantas Raudonis Martynas Skapas Valentina Plausinaitiene |
| author_sort | Tomas Murauskas |
| collection | DOAJ |
| description | Perovskite-type La:BaSnO<sub>3</sub> (LBSO) has been drawing considerable attention due to its high electron mobility and optical transparency. Its thin film electrical properties, however, remain inferior to those of single crystals. This work investigates the thermal post-treatment process of films deposited using the metalorganic chemical vapor deposition method to improve the electrical properties of different stoichiometry films, and demonstrates the modification of thin film’s structural properties using short and excessive annealing durations in vacuum conditions. Using vacuum post-treatment, we demonstrate the improvement of electrical properties in Ba-rich, near-stoichiometric, and Sn-rich samples with a maximum electron mobility of 116 cm<sup>2</sup>V<sup>−1</sup>s<sup>−1</sup> at r.t. However, the improvement of electrical properties causes surface morphology and internal structural changes, which depend on thin film composition. At temperatures of 900 °C–1400 °C the volatile nature of LBSO constituting elements is described, which reveals possible deterioration mechanisms of thin LBSO air. At higher than 1200 °C, LBSO film’s decomposition rate increases exponentially. Thin film structure evolution and previously unreported decomposition is demonstrated by Ba and La diffusion to the substrate, and by evaporation of SnO-SnO<sub>x</sub> species. |
| first_indexed | 2024-03-09T06:06:52Z |
| format | Article |
| id | doaj.art-fb8fb1ce8a764f95b1cba0210b2f9257 |
| institution | Directory Open Access Journal |
| issn | 2079-4991 |
| language | English |
| last_indexed | 2024-03-09T06:06:52Z |
| publishDate | 2022-07-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Nanomaterials |
| spelling | doaj.art-fb8fb1ce8a764f95b1cba0210b2f92572023-12-03T12:03:23ZengMDPI AGNanomaterials2079-49912022-07-011214240810.3390/nano12142408Structure Modification, Evolution, and Compositional Changes of Highly Conductive La:BaSnO<sub>3</sub> Thin Films Annealed in Vacuum and Air AtmosphereTomas Murauskas0Virgaudas Kubilius1Rimantas Raudonis2Martynas Skapas3Valentina Plausinaitiene4Institute of Chemistry, Faculty of Chemistry and Geosciences, Vilnius University, Naugarduko Str. 24, LT-03225 Vilnius, LithuaniaInstitute of Chemistry, Faculty of Chemistry and Geosciences, Vilnius University, Naugarduko Str. 24, LT-03225 Vilnius, LithuaniaInstitute of Chemistry, Faculty of Chemistry and Geosciences, Vilnius University, Naugarduko Str. 24, LT-03225 Vilnius, LithuaniaCenter for Physical Science and Technology, Saulėtekio Av. 3, LT-10259 Vilnius, LithuaniaInstitute of Chemistry, Faculty of Chemistry and Geosciences, Vilnius University, Naugarduko Str. 24, LT-03225 Vilnius, LithuaniaPerovskite-type La:BaSnO<sub>3</sub> (LBSO) has been drawing considerable attention due to its high electron mobility and optical transparency. Its thin film electrical properties, however, remain inferior to those of single crystals. This work investigates the thermal post-treatment process of films deposited using the metalorganic chemical vapor deposition method to improve the electrical properties of different stoichiometry films, and demonstrates the modification of thin film’s structural properties using short and excessive annealing durations in vacuum conditions. Using vacuum post-treatment, we demonstrate the improvement of electrical properties in Ba-rich, near-stoichiometric, and Sn-rich samples with a maximum electron mobility of 116 cm<sup>2</sup>V<sup>−1</sup>s<sup>−1</sup> at r.t. However, the improvement of electrical properties causes surface morphology and internal structural changes, which depend on thin film composition. At temperatures of 900 °C–1400 °C the volatile nature of LBSO constituting elements is described, which reveals possible deterioration mechanisms of thin LBSO air. At higher than 1200 °C, LBSO film’s decomposition rate increases exponentially. Thin film structure evolution and previously unreported decomposition is demonstrated by Ba and La diffusion to the substrate, and by evaporation of SnO-SnO<sub>x</sub> species.https://www.mdpi.com/2079-4991/12/14/2408chemical vapor decompositionnonstoichiometryperovskite oxide thin filmsLa:BaSnO<sub>3</sub>annealingsurface morphology |
| spellingShingle | Tomas Murauskas Virgaudas Kubilius Rimantas Raudonis Martynas Skapas Valentina Plausinaitiene Structure Modification, Evolution, and Compositional Changes of Highly Conductive La:BaSnO<sub>3</sub> Thin Films Annealed in Vacuum and Air Atmosphere Nanomaterials chemical vapor decomposition nonstoichiometry perovskite oxide thin films La:BaSnO<sub>3</sub> annealing surface morphology |
| title | Structure Modification, Evolution, and Compositional Changes of Highly Conductive La:BaSnO<sub>3</sub> Thin Films Annealed in Vacuum and Air Atmosphere |
| title_full | Structure Modification, Evolution, and Compositional Changes of Highly Conductive La:BaSnO<sub>3</sub> Thin Films Annealed in Vacuum and Air Atmosphere |
| title_fullStr | Structure Modification, Evolution, and Compositional Changes of Highly Conductive La:BaSnO<sub>3</sub> Thin Films Annealed in Vacuum and Air Atmosphere |
| title_full_unstemmed | Structure Modification, Evolution, and Compositional Changes of Highly Conductive La:BaSnO<sub>3</sub> Thin Films Annealed in Vacuum and Air Atmosphere |
| title_short | Structure Modification, Evolution, and Compositional Changes of Highly Conductive La:BaSnO<sub>3</sub> Thin Films Annealed in Vacuum and Air Atmosphere |
| title_sort | structure modification evolution and compositional changes of highly conductive la basno sub 3 sub thin films annealed in vacuum and air atmosphere |
| topic | chemical vapor decomposition nonstoichiometry perovskite oxide thin films La:BaSnO<sub>3</sub> annealing surface morphology |
| url | https://www.mdpi.com/2079-4991/12/14/2408 |
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