Design of U-Shaped Frequency Tunable Microwave Filters in MEMS Technology
U-shaped microwave resonators implemented by RF MEMS switches can be considered the result of a novel design approach for obtaining small-footprint tunable resonators, owing to the bent shape of the resonator and the microsystem solution for changing the frequency of resonance. In this paper, we dis...
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Format: | Article |
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MDPI AG
2023-01-01
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Series: | Sensors |
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Online Access: | https://www.mdpi.com/1424-8220/23/1/466 |
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author | Flavio Giacomozzi Emanuela Proietti Giovanni Capoccia Giovanni Maria Sardi Giancarlo Bartolucci Jacopo Iannacci Girolamo Tagliapietra Benno Margesin Romolo Marcelli |
author_facet | Flavio Giacomozzi Emanuela Proietti Giovanni Capoccia Giovanni Maria Sardi Giancarlo Bartolucci Jacopo Iannacci Girolamo Tagliapietra Benno Margesin Romolo Marcelli |
author_sort | Flavio Giacomozzi |
collection | DOAJ |
description | U-shaped microwave resonators implemented by RF MEMS switches can be considered the result of a novel design approach for obtaining small-footprint tunable resonators, owing to the bent shape of the resonator and the microsystem solution for changing the frequency of resonance. In this paper, we discuss the design approach for potential configurations of U-shaped structures combined with ohmic RF MEMS switches. Owing to their prospective application in RADAR and satellite systems, the devices were assessed for K-Band operation, specifically for 15 GHz, 20 GHz, and 26 GHz. The ON-OFF states determined by an electrostatic actuation of metal beams composing the RF MEMS ohmic switches allow for selecting different path lengths corresponding to different frequencies. In this contribution, initial configurations were designed and manufactured as a proof-of-concept. The advantages and critical aspects of the designs are discussed in detail. |
first_indexed | 2024-03-09T11:56:09Z |
format | Article |
id | doaj.art-fba35b5e260649bb9c5c6f3be2cece63 |
institution | Directory Open Access Journal |
issn | 1424-8220 |
language | English |
last_indexed | 2024-03-09T11:56:09Z |
publishDate | 2023-01-01 |
publisher | MDPI AG |
record_format | Article |
series | Sensors |
spelling | doaj.art-fba35b5e260649bb9c5c6f3be2cece632023-11-30T23:09:42ZengMDPI AGSensors1424-82202023-01-0123146610.3390/s23010466Design of U-Shaped Frequency Tunable Microwave Filters in MEMS TechnologyFlavio Giacomozzi0Emanuela Proietti1Giovanni Capoccia2Giovanni Maria Sardi3Giancarlo Bartolucci4Jacopo Iannacci5Girolamo Tagliapietra6Benno Margesin7Romolo Marcelli8Fondazione Bruno Kessler, 38123 Trento, ItalyCNR-IMM, 00133 Roma, ItalyCNR-IMM, 00133 Roma, ItalyCNR-IMM, 00133 Roma, ItalyCNR-IMM, 00133 Roma, ItalyFondazione Bruno Kessler, 38123 Trento, ItalyFondazione Bruno Kessler, 38123 Trento, ItalyFondazione Bruno Kessler, 38123 Trento, ItalyCNR-IMM, 00133 Roma, ItalyU-shaped microwave resonators implemented by RF MEMS switches can be considered the result of a novel design approach for obtaining small-footprint tunable resonators, owing to the bent shape of the resonator and the microsystem solution for changing the frequency of resonance. In this paper, we discuss the design approach for potential configurations of U-shaped structures combined with ohmic RF MEMS switches. Owing to their prospective application in RADAR and satellite systems, the devices were assessed for K-Band operation, specifically for 15 GHz, 20 GHz, and 26 GHz. The ON-OFF states determined by an electrostatic actuation of metal beams composing the RF MEMS ohmic switches allow for selecting different path lengths corresponding to different frequencies. In this contribution, initial configurations were designed and manufactured as a proof-of-concept. The advantages and critical aspects of the designs are discussed in detail.https://www.mdpi.com/1424-8220/23/1/466RF MEMSmicrowave resonatorsfrequency tunability |
spellingShingle | Flavio Giacomozzi Emanuela Proietti Giovanni Capoccia Giovanni Maria Sardi Giancarlo Bartolucci Jacopo Iannacci Girolamo Tagliapietra Benno Margesin Romolo Marcelli Design of U-Shaped Frequency Tunable Microwave Filters in MEMS Technology Sensors RF MEMS microwave resonators frequency tunability |
title | Design of U-Shaped Frequency Tunable Microwave Filters in MEMS Technology |
title_full | Design of U-Shaped Frequency Tunable Microwave Filters in MEMS Technology |
title_fullStr | Design of U-Shaped Frequency Tunable Microwave Filters in MEMS Technology |
title_full_unstemmed | Design of U-Shaped Frequency Tunable Microwave Filters in MEMS Technology |
title_short | Design of U-Shaped Frequency Tunable Microwave Filters in MEMS Technology |
title_sort | design of u shaped frequency tunable microwave filters in mems technology |
topic | RF MEMS microwave resonators frequency tunability |
url | https://www.mdpi.com/1424-8220/23/1/466 |
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