Design of U-Shaped Frequency Tunable Microwave Filters in MEMS Technology

U-shaped microwave resonators implemented by RF MEMS switches can be considered the result of a novel design approach for obtaining small-footprint tunable resonators, owing to the bent shape of the resonator and the microsystem solution for changing the frequency of resonance. In this paper, we dis...

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Main Authors: Flavio Giacomozzi, Emanuela Proietti, Giovanni Capoccia, Giovanni Maria Sardi, Giancarlo Bartolucci, Jacopo Iannacci, Girolamo Tagliapietra, Benno Margesin, Romolo Marcelli
Format: Article
Language:English
Published: MDPI AG 2023-01-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/23/1/466
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author Flavio Giacomozzi
Emanuela Proietti
Giovanni Capoccia
Giovanni Maria Sardi
Giancarlo Bartolucci
Jacopo Iannacci
Girolamo Tagliapietra
Benno Margesin
Romolo Marcelli
author_facet Flavio Giacomozzi
Emanuela Proietti
Giovanni Capoccia
Giovanni Maria Sardi
Giancarlo Bartolucci
Jacopo Iannacci
Girolamo Tagliapietra
Benno Margesin
Romolo Marcelli
author_sort Flavio Giacomozzi
collection DOAJ
description U-shaped microwave resonators implemented by RF MEMS switches can be considered the result of a novel design approach for obtaining small-footprint tunable resonators, owing to the bent shape of the resonator and the microsystem solution for changing the frequency of resonance. In this paper, we discuss the design approach for potential configurations of U-shaped structures combined with ohmic RF MEMS switches. Owing to their prospective application in RADAR and satellite systems, the devices were assessed for K-Band operation, specifically for 15 GHz, 20 GHz, and 26 GHz. The ON-OFF states determined by an electrostatic actuation of metal beams composing the RF MEMS ohmic switches allow for selecting different path lengths corresponding to different frequencies. In this contribution, initial configurations were designed and manufactured as a proof-of-concept. The advantages and critical aspects of the designs are discussed in detail.
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spelling doaj.art-fba35b5e260649bb9c5c6f3be2cece632023-11-30T23:09:42ZengMDPI AGSensors1424-82202023-01-0123146610.3390/s23010466Design of U-Shaped Frequency Tunable Microwave Filters in MEMS TechnologyFlavio Giacomozzi0Emanuela Proietti1Giovanni Capoccia2Giovanni Maria Sardi3Giancarlo Bartolucci4Jacopo Iannacci5Girolamo Tagliapietra6Benno Margesin7Romolo Marcelli8Fondazione Bruno Kessler, 38123 Trento, ItalyCNR-IMM, 00133 Roma, ItalyCNR-IMM, 00133 Roma, ItalyCNR-IMM, 00133 Roma, ItalyCNR-IMM, 00133 Roma, ItalyFondazione Bruno Kessler, 38123 Trento, ItalyFondazione Bruno Kessler, 38123 Trento, ItalyFondazione Bruno Kessler, 38123 Trento, ItalyCNR-IMM, 00133 Roma, ItalyU-shaped microwave resonators implemented by RF MEMS switches can be considered the result of a novel design approach for obtaining small-footprint tunable resonators, owing to the bent shape of the resonator and the microsystem solution for changing the frequency of resonance. In this paper, we discuss the design approach for potential configurations of U-shaped structures combined with ohmic RF MEMS switches. Owing to their prospective application in RADAR and satellite systems, the devices were assessed for K-Band operation, specifically for 15 GHz, 20 GHz, and 26 GHz. The ON-OFF states determined by an electrostatic actuation of metal beams composing the RF MEMS ohmic switches allow for selecting different path lengths corresponding to different frequencies. In this contribution, initial configurations were designed and manufactured as a proof-of-concept. The advantages and critical aspects of the designs are discussed in detail.https://www.mdpi.com/1424-8220/23/1/466RF MEMSmicrowave resonatorsfrequency tunability
spellingShingle Flavio Giacomozzi
Emanuela Proietti
Giovanni Capoccia
Giovanni Maria Sardi
Giancarlo Bartolucci
Jacopo Iannacci
Girolamo Tagliapietra
Benno Margesin
Romolo Marcelli
Design of U-Shaped Frequency Tunable Microwave Filters in MEMS Technology
Sensors
RF MEMS
microwave resonators
frequency tunability
title Design of U-Shaped Frequency Tunable Microwave Filters in MEMS Technology
title_full Design of U-Shaped Frequency Tunable Microwave Filters in MEMS Technology
title_fullStr Design of U-Shaped Frequency Tunable Microwave Filters in MEMS Technology
title_full_unstemmed Design of U-Shaped Frequency Tunable Microwave Filters in MEMS Technology
title_short Design of U-Shaped Frequency Tunable Microwave Filters in MEMS Technology
title_sort design of u shaped frequency tunable microwave filters in mems technology
topic RF MEMS
microwave resonators
frequency tunability
url https://www.mdpi.com/1424-8220/23/1/466
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