Low-Frequency Noise Behavior of AlGaN/GaN HEMTs with Different Al Compositions

Al<sub>x</sub>Ga<sub>1−x</sub>N/GaN heterostructures with two kinds of Al composition were grown by metal organic chemical vapor deposition (MOCVD) on sapphire substrates. The Al compositions in the AlGaN barrier layer were confirmed to be 13% and 28% using high resolution X-...

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Main Authors: Yeo Jin Choi, Jae-Hoon Lee, Sung Jin An, Ki-Sik Im
Format: Article
Language:English
Published: MDPI AG 2020-09-01
Series:Crystals
Subjects:
Online Access:https://www.mdpi.com/2073-4352/10/9/830
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author Yeo Jin Choi
Jae-Hoon Lee
Sung Jin An
Ki-Sik Im
author_facet Yeo Jin Choi
Jae-Hoon Lee
Sung Jin An
Ki-Sik Im
author_sort Yeo Jin Choi
collection DOAJ
description Al<sub>x</sub>Ga<sub>1−x</sub>N/GaN heterostructures with two kinds of Al composition were grown by metal organic chemical vapor deposition (MOCVD) on sapphire substrates. The Al compositions in the AlGaN barrier layer were confirmed to be 13% and 28% using high resolution X-ray diffraction (HRXRD). Al<sub>x</sub>Ga<sub>1−x</sub>N/GaN high-electron mobility transistors (HEMTs) with different Al compositions were fabricated, characterized, and compared using the Hall effect, direct current (DC), and low-frequency noise (LFN). The device with high Al composition (28%) showed improved sheet resistance (R<sub>sh</sub>) due to enhanced carrier confinement and reduced gate leakage currents caused by increased Schottky barrier height (SBH). On the other hand, the reduced noise level and the low trap density (N<sub>t</sub>) for the device of 13% of Al composition were obtained, which is attributed to the mitigated carrier density and decreased dislocation density in the Al<sub>x</sub>Ga<sub>1−x</sub>N barrier layer according to the declined Al composition. In spite of the Al composition, the fabricated devices exhibited 1/ƒ noise behavior with the carrier number fluctuation (CNF) model, which is proved by the curves of both (S<sub>Id</sub>/I<sub>d</sub><sup>2</sup>) versus (g<sub>m</sub>/I<sub>d</sub>)<sup>2</sup> and (S<sub>Id</sub>/I<sub>d</sub><sup>2</sup>) versus (V<sub>gs</sub>–V<sub>th</sub>). Although low Al composition is favorable to the reduced noise, it causes some problems like low R<sub>sh</sub> and high gate leakage current. Therefore, the optimized Al composition in AlGaN/GaN HEMT is required to improve both noise and DC properties.
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spelling doaj.art-fc2ed8ebb20d4976a8beae4c3136a41a2023-11-20T14:07:24ZengMDPI AGCrystals2073-43522020-09-0110983010.3390/cryst10090830Low-Frequency Noise Behavior of AlGaN/GaN HEMTs with Different Al CompositionsYeo Jin Choi0Jae-Hoon Lee1Sung Jin An2Ki-Sik Im3Department of Advanced Materials Science and Engineering, Kumoh National Institute of Technology, Gumi 39177, KoreaYield Enhancement Team, Foundry, Samsung Electronics Company Ltd., Yongin 17113, KoreaDepartment of Advanced Materials Science and Engineering, Kumoh National Institute of Technology, Gumi 39177, KoreaAdvanced Material Research Center, Kumoh National Institute of Technology, Gumi 39177, KoreaAl<sub>x</sub>Ga<sub>1−x</sub>N/GaN heterostructures with two kinds of Al composition were grown by metal organic chemical vapor deposition (MOCVD) on sapphire substrates. The Al compositions in the AlGaN barrier layer were confirmed to be 13% and 28% using high resolution X-ray diffraction (HRXRD). Al<sub>x</sub>Ga<sub>1−x</sub>N/GaN high-electron mobility transistors (HEMTs) with different Al compositions were fabricated, characterized, and compared using the Hall effect, direct current (DC), and low-frequency noise (LFN). The device with high Al composition (28%) showed improved sheet resistance (R<sub>sh</sub>) due to enhanced carrier confinement and reduced gate leakage currents caused by increased Schottky barrier height (SBH). On the other hand, the reduced noise level and the low trap density (N<sub>t</sub>) for the device of 13% of Al composition were obtained, which is attributed to the mitigated carrier density and decreased dislocation density in the Al<sub>x</sub>Ga<sub>1−x</sub>N barrier layer according to the declined Al composition. In spite of the Al composition, the fabricated devices exhibited 1/ƒ noise behavior with the carrier number fluctuation (CNF) model, which is proved by the curves of both (S<sub>Id</sub>/I<sub>d</sub><sup>2</sup>) versus (g<sub>m</sub>/I<sub>d</sub>)<sup>2</sup> and (S<sub>Id</sub>/I<sub>d</sub><sup>2</sup>) versus (V<sub>gs</sub>–V<sub>th</sub>). Although low Al composition is favorable to the reduced noise, it causes some problems like low R<sub>sh</sub> and high gate leakage current. Therefore, the optimized Al composition in AlGaN/GaN HEMT is required to improve both noise and DC properties.https://www.mdpi.com/2073-4352/10/9/830GaNAlGaNHEMTAl compositionlow-frequency noisecarrier number fluctuation
spellingShingle Yeo Jin Choi
Jae-Hoon Lee
Sung Jin An
Ki-Sik Im
Low-Frequency Noise Behavior of AlGaN/GaN HEMTs with Different Al Compositions
Crystals
GaN
AlGaN
HEMT
Al composition
low-frequency noise
carrier number fluctuation
title Low-Frequency Noise Behavior of AlGaN/GaN HEMTs with Different Al Compositions
title_full Low-Frequency Noise Behavior of AlGaN/GaN HEMTs with Different Al Compositions
title_fullStr Low-Frequency Noise Behavior of AlGaN/GaN HEMTs with Different Al Compositions
title_full_unstemmed Low-Frequency Noise Behavior of AlGaN/GaN HEMTs with Different Al Compositions
title_short Low-Frequency Noise Behavior of AlGaN/GaN HEMTs with Different Al Compositions
title_sort low frequency noise behavior of algan gan hemts with different al compositions
topic GaN
AlGaN
HEMT
Al composition
low-frequency noise
carrier number fluctuation
url https://www.mdpi.com/2073-4352/10/9/830
work_keys_str_mv AT yeojinchoi lowfrequencynoisebehaviorofalganganhemtswithdifferentalcompositions
AT jaehoonlee lowfrequencynoisebehaviorofalganganhemtswithdifferentalcompositions
AT sungjinan lowfrequencynoisebehaviorofalganganhemtswithdifferentalcompositions
AT kisikim lowfrequencynoisebehaviorofalganganhemtswithdifferentalcompositions