SYSTEM OF STABILIZATION OF REACTIVE MAGNETRON SPUTTERING PROCESS
Film coatings today allow to create large number of diverse structures in electronics, microelectronics, optics, architecture and construction. Leading technologies in this area are magnetron deposition technologies. The problem of magnetron deposition methods is insufficient reproducibility of the...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Belarusian National Technical University
2018-06-01
|
| Series: | Pribory i Metody Izmerenij |
| Subjects: | |
| Online Access: | https://pimi.bntu.by/jour/article/view/373 |