Sputtering and redeposition of ion irradiated Au nanoparticle arrays: direct comparison of simulations to experiments

Ion beam processing of surfaces is well known to lead to sputtering, which conventionally is associated only with erosion of atoms from the material. We show here, by combination of experiments and a newly developed Monte Carlo algorithm, that in the case of nanoparticles in a regular two-dimensiona...

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Main Authors: Henry Holland-Moritz, Andrey Ilinov, Flyura Djurabekova, Kai Nordlund, Carsten Ronning
Format: Article
Language:English
Published: IOP Publishing 2017-01-01
Series:New Journal of Physics
Subjects:
Online Access:https://doi.org/10.1088/1367-2630/aa56eb
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author Henry Holland-Moritz
Andrey Ilinov
Flyura Djurabekova
Kai Nordlund
Carsten Ronning
author_facet Henry Holland-Moritz
Andrey Ilinov
Flyura Djurabekova
Kai Nordlund
Carsten Ronning
author_sort Henry Holland-Moritz
collection DOAJ
description Ion beam processing of surfaces is well known to lead to sputtering, which conventionally is associated only with erosion of atoms from the material. We show here, by combination of experiments and a newly developed Monte Carlo algorithm, that in the case of nanoparticles in a regular two-dimensional array on surfaces, the redeposition of sputtered atoms may play a significant role on the system development. The simulations are directly compared to in situ experiments obtained using a dual focused Ga ^+ ion beam system and high resolution scanning electron microscopy, and explain the size evolution by a combination of sputtering and redeposition of sputtered material on neighboring particles. The effect is found to be dependent on the size of the nanoparticles: if the nanoparticle size is comparable to the ion range, the reposition is negligible. For larger nanoparticles the redeposition becomes significant and is able to compensate up to 20% of the sputtered material, effectively reducing the process of sputtering. The redeposition may even lead to significant growth: this was seen for the nanoparticles with the sizes much smaller than the ion range. Furthermore, the algorithm shows that significant redeposition is possible when the large size neighboring nanoparticles are present.
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spelling doaj.art-fcabec6503fa433186a55c40daba59fe2023-08-08T14:34:34ZengIOP PublishingNew Journal of Physics1367-26302017-01-0119101302310.1088/1367-2630/aa56ebSputtering and redeposition of ion irradiated Au nanoparticle arrays: direct comparison of simulations to experimentsHenry Holland-Moritz0Andrey Ilinov1Flyura Djurabekova2Kai Nordlund3https://orcid.org/0000-0001-6244-1942Carsten Ronning4Institute of Solid State Physics, University of Jena , Max-Wien-Platz 1, D-07743 Jena, GermanyDepartment of Physics, University of Helsinki , PO Box 43, FI-00014, FinlandDepartment of Physics, University of Helsinki , PO Box 43, FI-00014, FinlandDepartment of Physics, University of Helsinki , PO Box 43, FI-00014, FinlandInstitute of Solid State Physics, University of Jena , Max-Wien-Platz 1, D-07743 Jena, GermanyIon beam processing of surfaces is well known to lead to sputtering, which conventionally is associated only with erosion of atoms from the material. We show here, by combination of experiments and a newly developed Monte Carlo algorithm, that in the case of nanoparticles in a regular two-dimensional array on surfaces, the redeposition of sputtered atoms may play a significant role on the system development. The simulations are directly compared to in situ experiments obtained using a dual focused Ga ^+ ion beam system and high resolution scanning electron microscopy, and explain the size evolution by a combination of sputtering and redeposition of sputtered material on neighboring particles. The effect is found to be dependent on the size of the nanoparticles: if the nanoparticle size is comparable to the ion range, the reposition is negligible. For larger nanoparticles the redeposition becomes significant and is able to compensate up to 20% of the sputtered material, effectively reducing the process of sputtering. The redeposition may even lead to significant growth: this was seen for the nanoparticles with the sizes much smaller than the ion range. Furthermore, the algorithm shows that significant redeposition is possible when the large size neighboring nanoparticles are present.https://doi.org/10.1088/1367-2630/aa56ebsputteringredepositionion beam modificationnanoparticles
spellingShingle Henry Holland-Moritz
Andrey Ilinov
Flyura Djurabekova
Kai Nordlund
Carsten Ronning
Sputtering and redeposition of ion irradiated Au nanoparticle arrays: direct comparison of simulations to experiments
New Journal of Physics
sputtering
redeposition
ion beam modification
nanoparticles
title Sputtering and redeposition of ion irradiated Au nanoparticle arrays: direct comparison of simulations to experiments
title_full Sputtering and redeposition of ion irradiated Au nanoparticle arrays: direct comparison of simulations to experiments
title_fullStr Sputtering and redeposition of ion irradiated Au nanoparticle arrays: direct comparison of simulations to experiments
title_full_unstemmed Sputtering and redeposition of ion irradiated Au nanoparticle arrays: direct comparison of simulations to experiments
title_short Sputtering and redeposition of ion irradiated Au nanoparticle arrays: direct comparison of simulations to experiments
title_sort sputtering and redeposition of ion irradiated au nanoparticle arrays direct comparison of simulations to experiments
topic sputtering
redeposition
ion beam modification
nanoparticles
url https://doi.org/10.1088/1367-2630/aa56eb
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AT flyuradjurabekova sputteringandredepositionofionirradiatedaunanoparticlearraysdirectcomparisonofsimulationstoexperiments
AT kainordlund sputteringandredepositionofionirradiatedaunanoparticlearraysdirectcomparisonofsimulationstoexperiments
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