Multiscale Fabrication Process Optimization of DFB Cavities for Organic Laser Diodes
In the context of the quest for the Organic Laser Diode, we present the multiscale fabrication process optimization of mixed-order distributed-feedback micro-cavities integrated in nanosecond-short electrical pulse-ready organic light-emitting diodes (OLEDs). We combine ultra-short pulsed electrical...
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MDPI AG
2024-02-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/15/2/260 |
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| author | Amani Ouirimi Alex Chamberlain Chime Nixson Loganathan Mahmoud Chakaroun Quentin Gaimard Alexis P. A. Fischer |
| author_facet | Amani Ouirimi Alex Chamberlain Chime Nixson Loganathan Mahmoud Chakaroun Quentin Gaimard Alexis P. A. Fischer |
| author_sort | Amani Ouirimi |
| collection | DOAJ |
| description | In the context of the quest for the Organic Laser Diode, we present the multiscale fabrication process optimization of mixed-order distributed-feedback micro-cavities integrated in nanosecond-short electrical pulse-ready organic light-emitting diodes (OLEDs). We combine ultra-short pulsed electrical excitation and laser micro-cavities. This requires the integration of a highly resolved DFB micro-cavity with an OLED stack and with microwave electrodes. In a second challenge, we tune the cavity resonance precisely to the electroluminescence peak of the organic laser gain medium. This requires precise micro-cavity fabrication performed using e-beam lithography to pattern gratings with a precision in the nanometer scale. Optimal DFB micro-cavities are obtained with 300 nm thick hydrogen silsesquioxane negative-tone e-beam resist on 50 nm thin indium tin oxide anode exposed with a charge quantity per area (i.e., dose) of 620 µC/cm<sup>2</sup>, developed over 40 min in tetramethylammonium hydroxide diluted in water. We show that the integration of the DFB micro-cavity does not hinder the pulsed electrical operability of the device, which exhibits a peak current density as high as 14 kA/cm<sup>2</sup>. |
| first_indexed | 2024-03-07T22:21:24Z |
| format | Article |
| id | doaj.art-fcd045d4dc7d4e7a8fe995127dda744b |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-07T22:21:24Z |
| publishDate | 2024-02-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-fcd045d4dc7d4e7a8fe995127dda744b2024-02-23T15:27:49ZengMDPI AGMicromachines2072-666X2024-02-0115226010.3390/mi15020260Multiscale Fabrication Process Optimization of DFB Cavities for Organic Laser DiodesAmani Ouirimi0Alex Chamberlain Chime1Nixson Loganathan2Mahmoud Chakaroun3Quentin Gaimard4Alexis P. A. Fischer5Laboratoire de Physique des Lasers, UMR CNRS 7538, Université Sorbonne Paris Nord, 99 Avenue JB Clément, 93430 Villetaneuse, FranceLaboratoire de Physique des Lasers, UMR CNRS 7538, Université Sorbonne Paris Nord, 99 Avenue JB Clément, 93430 Villetaneuse, FranceCentrale de Proximité en Nanotechnologies de Paris Nord, Université Sorbonne Paris Nord, 99 Avenue JB Clément, 93430 Villetaneuse, FranceLaboratoire de Physique des Lasers, UMR CNRS 7538, Université Sorbonne Paris Nord, 99 Avenue JB Clément, 93430 Villetaneuse, FranceLaboratoire de Physique des Lasers, UMR CNRS 7538, Université Sorbonne Paris Nord, 99 Avenue JB Clément, 93430 Villetaneuse, FranceLaboratoire de Physique des Lasers, UMR CNRS 7538, Université Sorbonne Paris Nord, 99 Avenue JB Clément, 93430 Villetaneuse, FranceIn the context of the quest for the Organic Laser Diode, we present the multiscale fabrication process optimization of mixed-order distributed-feedback micro-cavities integrated in nanosecond-short electrical pulse-ready organic light-emitting diodes (OLEDs). We combine ultra-short pulsed electrical excitation and laser micro-cavities. This requires the integration of a highly resolved DFB micro-cavity with an OLED stack and with microwave electrodes. In a second challenge, we tune the cavity resonance precisely to the electroluminescence peak of the organic laser gain medium. This requires precise micro-cavity fabrication performed using e-beam lithography to pattern gratings with a precision in the nanometer scale. Optimal DFB micro-cavities are obtained with 300 nm thick hydrogen silsesquioxane negative-tone e-beam resist on 50 nm thin indium tin oxide anode exposed with a charge quantity per area (i.e., dose) of 620 µC/cm<sup>2</sup>, developed over 40 min in tetramethylammonium hydroxide diluted in water. We show that the integration of the DFB micro-cavity does not hinder the pulsed electrical operability of the device, which exhibits a peak current density as high as 14 kA/cm<sup>2</sup>.https://www.mdpi.com/2072-666X/15/2/260OLEDmicro-cavityDFBe-beam lithographyprocess optimizationOLD |
| spellingShingle | Amani Ouirimi Alex Chamberlain Chime Nixson Loganathan Mahmoud Chakaroun Quentin Gaimard Alexis P. A. Fischer Multiscale Fabrication Process Optimization of DFB Cavities for Organic Laser Diodes Micromachines OLED micro-cavity DFB e-beam lithography process optimization OLD |
| title | Multiscale Fabrication Process Optimization of DFB Cavities for Organic Laser Diodes |
| title_full | Multiscale Fabrication Process Optimization of DFB Cavities for Organic Laser Diodes |
| title_fullStr | Multiscale Fabrication Process Optimization of DFB Cavities for Organic Laser Diodes |
| title_full_unstemmed | Multiscale Fabrication Process Optimization of DFB Cavities for Organic Laser Diodes |
| title_short | Multiscale Fabrication Process Optimization of DFB Cavities for Organic Laser Diodes |
| title_sort | multiscale fabrication process optimization of dfb cavities for organic laser diodes |
| topic | OLED micro-cavity DFB e-beam lithography process optimization OLD |
| url | https://www.mdpi.com/2072-666X/15/2/260 |
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