Growth Mechanism of Periodic-Structured MoS<sub>2</sub> by Transmission Electron Microscopy
Molybdenum disulfide (MoS<sub>2</sub>) was grown on a laser-processed periodic-hole sapphire substrate through chemical vapor deposition. The main purpose was to investigate the mechanism of MoS<sub>2</sub> growth in substrate with a periodic structure. By controlling the amo...
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MDPI AG
2021-12-01
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author | Arvind Mukundan Yu-Ming Tsao Sofya B. Artemkina Vladimir E. Fedorov Hsiang-Chen Wang |
author_facet | Arvind Mukundan Yu-Ming Tsao Sofya B. Artemkina Vladimir E. Fedorov Hsiang-Chen Wang |
author_sort | Arvind Mukundan |
collection | DOAJ |
description | Molybdenum disulfide (MoS<sub>2</sub>) was grown on a laser-processed periodic-hole sapphire substrate through chemical vapor deposition. The main purpose was to investigate the mechanism of MoS<sub>2</sub> growth in substrate with a periodic structure. By controlling the amount and position of the precursor, adjusting the growth temperature and time, and setting the flow rate of argon gas, MoS<sub>2</sub> grew in the region of the periodic holes. A series of various growth layer analyses of MoS<sub>2</sub> were then confirmed by Raman spectroscopy, photoluminescence spectroscopy, and atomic force microscopy. Finally, the growth mechanism was studied by transmission electron microscopy (TEM). The experimental results show that in the appropriate environment, MoS<sub>2</sub> can be successfully grown on substrate with periodic holes, and the number of growth layers can be determined through measurements. By observing the growth mechanism, composition analysis, and selected area electron diffraction diagram by TEM, we comprehensively understand the growth phenomenon. The results of this research can serve as a reference for the large-scale periodic growth of MoS<sub>2</sub>. The production of periodic structures by laser drilling is advantageous, as it is relatively simpler than other methods. |
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spelling | doaj.art-fd076f318a96408ebf089d0afde669d32023-11-23T12:02:00ZengMDPI AGNanomaterials2079-49912021-12-0112113510.3390/nano12010135Growth Mechanism of Periodic-Structured MoS<sub>2</sub> by Transmission Electron MicroscopyArvind Mukundan0Yu-Ming Tsao1Sofya B. Artemkina2Vladimir E. Fedorov3Hsiang-Chen Wang4Department of Mechanical Engineering, Advanced Institute of Manufacturing with High Tech Innovations (AIM-HI), and Center for Innovative Research on Aging Society (CIRAS), National Chung Cheng University, 168, University Rd., Min Hsiung, Chia Yi 62102, TaiwanDepartment of Mechanical Engineering, Advanced Institute of Manufacturing with High Tech Innovations (AIM-HI), and Center for Innovative Research on Aging Society (CIRAS), National Chung Cheng University, 168, University Rd., Min Hsiung, Chia Yi 62102, TaiwanNikolaev Institute of Inorganic Chemistry, Siberian Branch of Russian Academy of Sciences, 630090 Novosibirsk, RussiaNikolaev Institute of Inorganic Chemistry, Siberian Branch of Russian Academy of Sciences, 630090 Novosibirsk, RussiaDepartment of Mechanical Engineering, Advanced Institute of Manufacturing with High Tech Innovations (AIM-HI), and Center for Innovative Research on Aging Society (CIRAS), National Chung Cheng University, 168, University Rd., Min Hsiung, Chia Yi 62102, TaiwanMolybdenum disulfide (MoS<sub>2</sub>) was grown on a laser-processed periodic-hole sapphire substrate through chemical vapor deposition. The main purpose was to investigate the mechanism of MoS<sub>2</sub> growth in substrate with a periodic structure. By controlling the amount and position of the precursor, adjusting the growth temperature and time, and setting the flow rate of argon gas, MoS<sub>2</sub> grew in the region of the periodic holes. A series of various growth layer analyses of MoS<sub>2</sub> were then confirmed by Raman spectroscopy, photoluminescence spectroscopy, and atomic force microscopy. Finally, the growth mechanism was studied by transmission electron microscopy (TEM). The experimental results show that in the appropriate environment, MoS<sub>2</sub> can be successfully grown on substrate with periodic holes, and the number of growth layers can be determined through measurements. By observing the growth mechanism, composition analysis, and selected area electron diffraction diagram by TEM, we comprehensively understand the growth phenomenon. The results of this research can serve as a reference for the large-scale periodic growth of MoS<sub>2</sub>. The production of periodic structures by laser drilling is advantageous, as it is relatively simpler than other methods.https://www.mdpi.com/2079-4991/12/1/135chemical vapor depositionperiodic growth of MoS<sub>2</sub>growth mechanism of MoS<sub>2</sub>Molybdenum disulfide (MoS<sub>2</sub>) |
spellingShingle | Arvind Mukundan Yu-Ming Tsao Sofya B. Artemkina Vladimir E. Fedorov Hsiang-Chen Wang Growth Mechanism of Periodic-Structured MoS<sub>2</sub> by Transmission Electron Microscopy Nanomaterials chemical vapor deposition periodic growth of MoS<sub>2</sub> growth mechanism of MoS<sub>2</sub> Molybdenum disulfide (MoS<sub>2</sub>) |
title | Growth Mechanism of Periodic-Structured MoS<sub>2</sub> by Transmission Electron Microscopy |
title_full | Growth Mechanism of Periodic-Structured MoS<sub>2</sub> by Transmission Electron Microscopy |
title_fullStr | Growth Mechanism of Periodic-Structured MoS<sub>2</sub> by Transmission Electron Microscopy |
title_full_unstemmed | Growth Mechanism of Periodic-Structured MoS<sub>2</sub> by Transmission Electron Microscopy |
title_short | Growth Mechanism of Periodic-Structured MoS<sub>2</sub> by Transmission Electron Microscopy |
title_sort | growth mechanism of periodic structured mos sub 2 sub by transmission electron microscopy |
topic | chemical vapor deposition periodic growth of MoS<sub>2</sub> growth mechanism of MoS<sub>2</sub> Molybdenum disulfide (MoS<sub>2</sub>) |
url | https://www.mdpi.com/2079-4991/12/1/135 |
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