Growth Mechanism of Periodic-Structured MoS<sub>2</sub> by Transmission Electron Microscopy

Molybdenum disulfide (MoS<sub>2</sub>) was grown on a laser-processed periodic-hole sapphire substrate through chemical vapor deposition. The main purpose was to investigate the mechanism of MoS<sub>2</sub> growth in substrate with a periodic structure. By controlling the amo...

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Main Authors: Arvind Mukundan, Yu-Ming Tsao, Sofya B. Artemkina, Vladimir E. Fedorov, Hsiang-Chen Wang
Format: Article
Language:English
Published: MDPI AG 2021-12-01
Series:Nanomaterials
Subjects:
Online Access:https://www.mdpi.com/2079-4991/12/1/135
_version_ 1827668034036170752
author Arvind Mukundan
Yu-Ming Tsao
Sofya B. Artemkina
Vladimir E. Fedorov
Hsiang-Chen Wang
author_facet Arvind Mukundan
Yu-Ming Tsao
Sofya B. Artemkina
Vladimir E. Fedorov
Hsiang-Chen Wang
author_sort Arvind Mukundan
collection DOAJ
description Molybdenum disulfide (MoS<sub>2</sub>) was grown on a laser-processed periodic-hole sapphire substrate through chemical vapor deposition. The main purpose was to investigate the mechanism of MoS<sub>2</sub> growth in substrate with a periodic structure. By controlling the amount and position of the precursor, adjusting the growth temperature and time, and setting the flow rate of argon gas, MoS<sub>2</sub> grew in the region of the periodic holes. A series of various growth layer analyses of MoS<sub>2</sub> were then confirmed by Raman spectroscopy, photoluminescence spectroscopy, and atomic force microscopy. Finally, the growth mechanism was studied by transmission electron microscopy (TEM). The experimental results show that in the appropriate environment, MoS<sub>2</sub> can be successfully grown on substrate with periodic holes, and the number of growth layers can be determined through measurements. By observing the growth mechanism, composition analysis, and selected area electron diffraction diagram by TEM, we comprehensively understand the growth phenomenon. The results of this research can serve as a reference for the large-scale periodic growth of MoS<sub>2</sub>. The production of periodic structures by laser drilling is advantageous, as it is relatively simpler than other methods.
first_indexed 2024-03-10T03:29:29Z
format Article
id doaj.art-fd076f318a96408ebf089d0afde669d3
institution Directory Open Access Journal
issn 2079-4991
language English
last_indexed 2024-03-10T03:29:29Z
publishDate 2021-12-01
publisher MDPI AG
record_format Article
series Nanomaterials
spelling doaj.art-fd076f318a96408ebf089d0afde669d32023-11-23T12:02:00ZengMDPI AGNanomaterials2079-49912021-12-0112113510.3390/nano12010135Growth Mechanism of Periodic-Structured MoS<sub>2</sub> by Transmission Electron MicroscopyArvind Mukundan0Yu-Ming Tsao1Sofya B. Artemkina2Vladimir E. Fedorov3Hsiang-Chen Wang4Department of Mechanical Engineering, Advanced Institute of Manufacturing with High Tech Innovations (AIM-HI), and Center for Innovative Research on Aging Society (CIRAS), National Chung Cheng University, 168, University Rd., Min Hsiung, Chia Yi 62102, TaiwanDepartment of Mechanical Engineering, Advanced Institute of Manufacturing with High Tech Innovations (AIM-HI), and Center for Innovative Research on Aging Society (CIRAS), National Chung Cheng University, 168, University Rd., Min Hsiung, Chia Yi 62102, TaiwanNikolaev Institute of Inorganic Chemistry, Siberian Branch of Russian Academy of Sciences, 630090 Novosibirsk, RussiaNikolaev Institute of Inorganic Chemistry, Siberian Branch of Russian Academy of Sciences, 630090 Novosibirsk, RussiaDepartment of Mechanical Engineering, Advanced Institute of Manufacturing with High Tech Innovations (AIM-HI), and Center for Innovative Research on Aging Society (CIRAS), National Chung Cheng University, 168, University Rd., Min Hsiung, Chia Yi 62102, TaiwanMolybdenum disulfide (MoS<sub>2</sub>) was grown on a laser-processed periodic-hole sapphire substrate through chemical vapor deposition. The main purpose was to investigate the mechanism of MoS<sub>2</sub> growth in substrate with a periodic structure. By controlling the amount and position of the precursor, adjusting the growth temperature and time, and setting the flow rate of argon gas, MoS<sub>2</sub> grew in the region of the periodic holes. A series of various growth layer analyses of MoS<sub>2</sub> were then confirmed by Raman spectroscopy, photoluminescence spectroscopy, and atomic force microscopy. Finally, the growth mechanism was studied by transmission electron microscopy (TEM). The experimental results show that in the appropriate environment, MoS<sub>2</sub> can be successfully grown on substrate with periodic holes, and the number of growth layers can be determined through measurements. By observing the growth mechanism, composition analysis, and selected area electron diffraction diagram by TEM, we comprehensively understand the growth phenomenon. The results of this research can serve as a reference for the large-scale periodic growth of MoS<sub>2</sub>. The production of periodic structures by laser drilling is advantageous, as it is relatively simpler than other methods.https://www.mdpi.com/2079-4991/12/1/135chemical vapor depositionperiodic growth of MoS<sub>2</sub>growth mechanism of MoS<sub>2</sub>Molybdenum disulfide (MoS<sub>2</sub>)
spellingShingle Arvind Mukundan
Yu-Ming Tsao
Sofya B. Artemkina
Vladimir E. Fedorov
Hsiang-Chen Wang
Growth Mechanism of Periodic-Structured MoS<sub>2</sub> by Transmission Electron Microscopy
Nanomaterials
chemical vapor deposition
periodic growth of MoS<sub>2</sub>
growth mechanism of MoS<sub>2</sub>
Molybdenum disulfide (MoS<sub>2</sub>)
title Growth Mechanism of Periodic-Structured MoS<sub>2</sub> by Transmission Electron Microscopy
title_full Growth Mechanism of Periodic-Structured MoS<sub>2</sub> by Transmission Electron Microscopy
title_fullStr Growth Mechanism of Periodic-Structured MoS<sub>2</sub> by Transmission Electron Microscopy
title_full_unstemmed Growth Mechanism of Periodic-Structured MoS<sub>2</sub> by Transmission Electron Microscopy
title_short Growth Mechanism of Periodic-Structured MoS<sub>2</sub> by Transmission Electron Microscopy
title_sort growth mechanism of periodic structured mos sub 2 sub by transmission electron microscopy
topic chemical vapor deposition
periodic growth of MoS<sub>2</sub>
growth mechanism of MoS<sub>2</sub>
Molybdenum disulfide (MoS<sub>2</sub>)
url https://www.mdpi.com/2079-4991/12/1/135
work_keys_str_mv AT arvindmukundan growthmechanismofperiodicstructuredmossub2subbytransmissionelectronmicroscopy
AT yumingtsao growthmechanismofperiodicstructuredmossub2subbytransmissionelectronmicroscopy
AT sofyabartemkina growthmechanismofperiodicstructuredmossub2subbytransmissionelectronmicroscopy
AT vladimirefedorov growthmechanismofperiodicstructuredmossub2subbytransmissionelectronmicroscopy
AT hsiangchenwang growthmechanismofperiodicstructuredmossub2subbytransmissionelectronmicroscopy