A High-Reliability RF MEMS Metal-Contact Switch Based on Al-Sc Alloy

A High-Reliability RF MEMS Metal-Contact Switch Based on Al-Sc Alloy

This paper presents a new metal-contact RF MEMS switch based on an Al-Sc alloy. The use of an Al-Sc alloy is intended to replace the traditional Au-Au contact, which can greatly improve the hardness of the contact, and thus improve the reliability of the switch. The multi-layer stack structure is ad...

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Bibliographic Details
Main Authors: Zhongxuan Hou, Yongkang Zhang, Chaowei Si, Guowei Han, Yongmei Zhao, Xiaorui Lu, Jiahui Liu, Jin Ning, Tongbo Wei
Format: Article
Language:English
Published: MDPI AG 2023-05-01
Series:Micromachines
Subjects:
RF MEMS
switch
Al-Sc alloy
S-parameters
Online Access:https://www.mdpi.com/2072-666X/14/6/1098

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