Fabrication of Micro-Cantilever Sensor Based on Clay Minerals for Humidity Detection

In this paper, novel humidity sensors based on montmorillonite, kaolinite, and composite films coated on micro-cantilevers were prepared to measure the relative humidity (RH) values by the deflection of a micro-cantilever (MC) at room temperature. The humidity-sensing properties, such as response an...

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Main Authors: Yiting Xu, Song Liu, Junfeng Zhang, Songyang Chai, Jianjun Li, Changguo Xue, Shangquan Wu
Format: Article
Language:English
Published: MDPI AG 2023-08-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/23/15/6962
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author Yiting Xu
Song Liu
Junfeng Zhang
Songyang Chai
Jianjun Li
Changguo Xue
Shangquan Wu
author_facet Yiting Xu
Song Liu
Junfeng Zhang
Songyang Chai
Jianjun Li
Changguo Xue
Shangquan Wu
author_sort Yiting Xu
collection DOAJ
description In this paper, novel humidity sensors based on montmorillonite, kaolinite, and composite films coated on micro-cantilevers were prepared to measure the relative humidity (RH) values by the deflection of a micro-cantilever (MC) at room temperature. The humidity-sensing properties, such as response and recovery, sensitivity, repeatability, humidity hysteresis, and long-term stability, were investigated in the range of working humidity (10–80% RH). The humidity response in the close humidity range of 10% RH to 80% RH revealed a linear increase in water absorption of montmorillonite, kaolinite, and montmorillonite/kaolinite mixed dispersant (1:1) as a function of RH with linear correlation factors between the humidity change and deflection estimated to be 0.994, 0.991, and 0.946, respectively. Montmorillonite’s sensitivity was better than kaolinite’s, with the mixed-clay mineral film’s response falling somewhere in between. This research provides a feasible and effective approach to constructing high-performance MC humidity sensors that can be operated at room temperature based on clay minerals.
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spelling doaj.art-fd82d8a9370a417b95bbbc313dbe84742023-11-18T23:36:48ZengMDPI AGSensors1424-82202023-08-012315696210.3390/s23156962Fabrication of Micro-Cantilever Sensor Based on Clay Minerals for Humidity DetectionYiting Xu0Song Liu1Junfeng Zhang2Songyang Chai3Jianjun Li4Changguo Xue5Shangquan Wu6School of Materials Science and Engineering, Anhui University of Science and Technology, Huainan 232001, ChinaSchool of Materials Science and Engineering, Anhui University of Science and Technology, Huainan 232001, ChinaSchool of Materials Science and Engineering, Anhui University of Science and Technology, Huainan 232001, ChinaSchool of Materials Science and Engineering, Anhui University of Science and Technology, Huainan 232001, ChinaSchool of Materials Science and Engineering, Anhui University of Science and Technology, Huainan 232001, ChinaSchool of Materials Science and Engineering, Anhui University of Science and Technology, Huainan 232001, ChinaCAS Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 230026, ChinaIn this paper, novel humidity sensors based on montmorillonite, kaolinite, and composite films coated on micro-cantilevers were prepared to measure the relative humidity (RH) values by the deflection of a micro-cantilever (MC) at room temperature. The humidity-sensing properties, such as response and recovery, sensitivity, repeatability, humidity hysteresis, and long-term stability, were investigated in the range of working humidity (10–80% RH). The humidity response in the close humidity range of 10% RH to 80% RH revealed a linear increase in water absorption of montmorillonite, kaolinite, and montmorillonite/kaolinite mixed dispersant (1:1) as a function of RH with linear correlation factors between the humidity change and deflection estimated to be 0.994, 0.991, and 0.946, respectively. Montmorillonite’s sensitivity was better than kaolinite’s, with the mixed-clay mineral film’s response falling somewhere in between. This research provides a feasible and effective approach to constructing high-performance MC humidity sensors that can be operated at room temperature based on clay minerals.https://www.mdpi.com/1424-8220/23/15/6962humidity sensormicro-cantilevermontmorillonitekaolinite
spellingShingle Yiting Xu
Song Liu
Junfeng Zhang
Songyang Chai
Jianjun Li
Changguo Xue
Shangquan Wu
Fabrication of Micro-Cantilever Sensor Based on Clay Minerals for Humidity Detection
Sensors
humidity sensor
micro-cantilever
montmorillonite
kaolinite
title Fabrication of Micro-Cantilever Sensor Based on Clay Minerals for Humidity Detection
title_full Fabrication of Micro-Cantilever Sensor Based on Clay Minerals for Humidity Detection
title_fullStr Fabrication of Micro-Cantilever Sensor Based on Clay Minerals for Humidity Detection
title_full_unstemmed Fabrication of Micro-Cantilever Sensor Based on Clay Minerals for Humidity Detection
title_short Fabrication of Micro-Cantilever Sensor Based on Clay Minerals for Humidity Detection
title_sort fabrication of micro cantilever sensor based on clay minerals for humidity detection
topic humidity sensor
micro-cantilever
montmorillonite
kaolinite
url https://www.mdpi.com/1424-8220/23/15/6962
work_keys_str_mv AT yitingxu fabricationofmicrocantileversensorbasedonclaymineralsforhumiditydetection
AT songliu fabricationofmicrocantileversensorbasedonclaymineralsforhumiditydetection
AT junfengzhang fabricationofmicrocantileversensorbasedonclaymineralsforhumiditydetection
AT songyangchai fabricationofmicrocantileversensorbasedonclaymineralsforhumiditydetection
AT jianjunli fabricationofmicrocantileversensorbasedonclaymineralsforhumiditydetection
AT changguoxue fabricationofmicrocantileversensorbasedonclaymineralsforhumiditydetection
AT shangquanwu fabricationofmicrocantileversensorbasedonclaymineralsforhumiditydetection