Fabrication of Micro-Cantilever Sensor Based on Clay Minerals for Humidity Detection
In this paper, novel humidity sensors based on montmorillonite, kaolinite, and composite films coated on micro-cantilevers were prepared to measure the relative humidity (RH) values by the deflection of a micro-cantilever (MC) at room temperature. The humidity-sensing properties, such as response an...
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MDPI AG
2023-08-01
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Series: | Sensors |
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Online Access: | https://www.mdpi.com/1424-8220/23/15/6962 |
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author | Yiting Xu Song Liu Junfeng Zhang Songyang Chai Jianjun Li Changguo Xue Shangquan Wu |
author_facet | Yiting Xu Song Liu Junfeng Zhang Songyang Chai Jianjun Li Changguo Xue Shangquan Wu |
author_sort | Yiting Xu |
collection | DOAJ |
description | In this paper, novel humidity sensors based on montmorillonite, kaolinite, and composite films coated on micro-cantilevers were prepared to measure the relative humidity (RH) values by the deflection of a micro-cantilever (MC) at room temperature. The humidity-sensing properties, such as response and recovery, sensitivity, repeatability, humidity hysteresis, and long-term stability, were investigated in the range of working humidity (10–80% RH). The humidity response in the close humidity range of 10% RH to 80% RH revealed a linear increase in water absorption of montmorillonite, kaolinite, and montmorillonite/kaolinite mixed dispersant (1:1) as a function of RH with linear correlation factors between the humidity change and deflection estimated to be 0.994, 0.991, and 0.946, respectively. Montmorillonite’s sensitivity was better than kaolinite’s, with the mixed-clay mineral film’s response falling somewhere in between. This research provides a feasible and effective approach to constructing high-performance MC humidity sensors that can be operated at room temperature based on clay minerals. |
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institution | Directory Open Access Journal |
issn | 1424-8220 |
language | English |
last_indexed | 2024-03-11T00:17:02Z |
publishDate | 2023-08-01 |
publisher | MDPI AG |
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series | Sensors |
spelling | doaj.art-fd82d8a9370a417b95bbbc313dbe84742023-11-18T23:36:48ZengMDPI AGSensors1424-82202023-08-012315696210.3390/s23156962Fabrication of Micro-Cantilever Sensor Based on Clay Minerals for Humidity DetectionYiting Xu0Song Liu1Junfeng Zhang2Songyang Chai3Jianjun Li4Changguo Xue5Shangquan Wu6School of Materials Science and Engineering, Anhui University of Science and Technology, Huainan 232001, ChinaSchool of Materials Science and Engineering, Anhui University of Science and Technology, Huainan 232001, ChinaSchool of Materials Science and Engineering, Anhui University of Science and Technology, Huainan 232001, ChinaSchool of Materials Science and Engineering, Anhui University of Science and Technology, Huainan 232001, ChinaSchool of Materials Science and Engineering, Anhui University of Science and Technology, Huainan 232001, ChinaSchool of Materials Science and Engineering, Anhui University of Science and Technology, Huainan 232001, ChinaCAS Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 230026, ChinaIn this paper, novel humidity sensors based on montmorillonite, kaolinite, and composite films coated on micro-cantilevers were prepared to measure the relative humidity (RH) values by the deflection of a micro-cantilever (MC) at room temperature. The humidity-sensing properties, such as response and recovery, sensitivity, repeatability, humidity hysteresis, and long-term stability, were investigated in the range of working humidity (10–80% RH). The humidity response in the close humidity range of 10% RH to 80% RH revealed a linear increase in water absorption of montmorillonite, kaolinite, and montmorillonite/kaolinite mixed dispersant (1:1) as a function of RH with linear correlation factors between the humidity change and deflection estimated to be 0.994, 0.991, and 0.946, respectively. Montmorillonite’s sensitivity was better than kaolinite’s, with the mixed-clay mineral film’s response falling somewhere in between. This research provides a feasible and effective approach to constructing high-performance MC humidity sensors that can be operated at room temperature based on clay minerals.https://www.mdpi.com/1424-8220/23/15/6962humidity sensormicro-cantilevermontmorillonitekaolinite |
spellingShingle | Yiting Xu Song Liu Junfeng Zhang Songyang Chai Jianjun Li Changguo Xue Shangquan Wu Fabrication of Micro-Cantilever Sensor Based on Clay Minerals for Humidity Detection Sensors humidity sensor micro-cantilever montmorillonite kaolinite |
title | Fabrication of Micro-Cantilever Sensor Based on Clay Minerals for Humidity Detection |
title_full | Fabrication of Micro-Cantilever Sensor Based on Clay Minerals for Humidity Detection |
title_fullStr | Fabrication of Micro-Cantilever Sensor Based on Clay Minerals for Humidity Detection |
title_full_unstemmed | Fabrication of Micro-Cantilever Sensor Based on Clay Minerals for Humidity Detection |
title_short | Fabrication of Micro-Cantilever Sensor Based on Clay Minerals for Humidity Detection |
title_sort | fabrication of micro cantilever sensor based on clay minerals for humidity detection |
topic | humidity sensor micro-cantilever montmorillonite kaolinite |
url | https://www.mdpi.com/1424-8220/23/15/6962 |
work_keys_str_mv | AT yitingxu fabricationofmicrocantileversensorbasedonclaymineralsforhumiditydetection AT songliu fabricationofmicrocantileversensorbasedonclaymineralsforhumiditydetection AT junfengzhang fabricationofmicrocantileversensorbasedonclaymineralsforhumiditydetection AT songyangchai fabricationofmicrocantileversensorbasedonclaymineralsforhumiditydetection AT jianjunli fabricationofmicrocantileversensorbasedonclaymineralsforhumiditydetection AT changguoxue fabricationofmicrocantileversensorbasedonclaymineralsforhumiditydetection AT shangquanwu fabricationofmicrocantileversensorbasedonclaymineralsforhumiditydetection |