Polymer-derived SiBCN ceramic pressure sensor with excellent sensing performance
Abstract Pressure measurement with excellent stability and long time durability is highly desired, especially at high temperature and harsh environments. A polymer-derived silicoboron carbonitride (SiBCN) ceramic pressure sensor with excellent stability, accuracy, and repeatability is designed based...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Tsinghua University Press
2020-06-01
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| Series: | Journal of Advanced Ceramics |
| Subjects: | |
| Online Access: | http://link.springer.com/article/10.1007/s40145-020-0377-6 |
| _version_ | 1797722531481780224 |
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| author | Gang Shao Junpeng Jiang Mingjie Jiang Jie Su Wen Liu Hailong Wang Hongliang Xu Hongxia Lit Rui Zhang |
| author_facet | Gang Shao Junpeng Jiang Mingjie Jiang Jie Su Wen Liu Hailong Wang Hongliang Xu Hongxia Lit Rui Zhang |
| author_sort | Gang Shao |
| collection | DOAJ |
| description | Abstract Pressure measurement with excellent stability and long time durability is highly desired, especially at high temperature and harsh environments. A polymer-derived silicoboron carbonitride (SiBCN) ceramic pressure sensor with excellent stability, accuracy, and repeatability is designed based on the giant piezoresistivity of SiBCN ceramics. The SiBCN ceramic sensor was packaged in a stainless steel case and tested using half Wheatstone bridge with the uniaxial pressure up to 10 MPa. The SiBCN ceramic showed a remarkable piezoresistive effect with the gauge factor (K) as high as 5500. The output voltage of packed SiBCN ceramic sensor changes monotonically and smoothly versus external pressure. The as received SiBCN pressure sensor possesses features of short response time, excellent repeatability, stability, sensitivity, and accuracy. Taking the excellent high temperature thermo-mechanical properties of polymer-derived SiBCN ceramics (e.g., high temperature stability, oxidation/corrosion resistance) into account, SiBCN ceramic sensor has significant potential for pressure measurement at high temperature and harsh environments. |
| first_indexed | 2024-03-12T09:49:39Z |
| format | Article |
| id | doaj.art-fe047f416a11481f89e183f6741d0daf |
| institution | Directory Open Access Journal |
| issn | 2226-4108 2227-8508 |
| language | English |
| last_indexed | 2024-03-12T09:49:39Z |
| publishDate | 2020-06-01 |
| publisher | Tsinghua University Press |
| record_format | Article |
| series | Journal of Advanced Ceramics |
| spelling | doaj.art-fe047f416a11481f89e183f6741d0daf2023-09-02T12:42:40ZengTsinghua University PressJournal of Advanced Ceramics2226-41082227-85082020-06-019337437910.1007/s40145-020-0377-6Polymer-derived SiBCN ceramic pressure sensor with excellent sensing performanceGang Shao0Junpeng Jiang1Mingjie Jiang2Jie Su3Wen Liu4Hailong Wang5Hongliang Xu6Hongxia Lit7Rui Zhang8School of Materials Science and Engineering, Zhengzhou UniversitySchool of Materials Science and Engineering, Zhengzhou UniversitySchool of Materials Science and Engineering, Zhengzhou UniversitySchool of Materials Science and Engineering, Zhengzhou UniversitySchool of Materials Science and Engineering, Zhengzhou UniversitySchool of Materials Science and Engineering, Zhengzhou UniversitySchool of Materials Science and Engineering, Zhengzhou UniversitySchool of Materials Science and Engineering, Zhengzhou UniversitySchool of Materials Science and Engineering, Zhengzhou UniversityAbstract Pressure measurement with excellent stability and long time durability is highly desired, especially at high temperature and harsh environments. A polymer-derived silicoboron carbonitride (SiBCN) ceramic pressure sensor with excellent stability, accuracy, and repeatability is designed based on the giant piezoresistivity of SiBCN ceramics. The SiBCN ceramic sensor was packaged in a stainless steel case and tested using half Wheatstone bridge with the uniaxial pressure up to 10 MPa. The SiBCN ceramic showed a remarkable piezoresistive effect with the gauge factor (K) as high as 5500. The output voltage of packed SiBCN ceramic sensor changes monotonically and smoothly versus external pressure. The as received SiBCN pressure sensor possesses features of short response time, excellent repeatability, stability, sensitivity, and accuracy. Taking the excellent high temperature thermo-mechanical properties of polymer-derived SiBCN ceramics (e.g., high temperature stability, oxidation/corrosion resistance) into account, SiBCN ceramic sensor has significant potential for pressure measurement at high temperature and harsh environments.http://link.springer.com/article/10.1007/s40145-020-0377-6polymer-derived ceramics (PDCs)silicoboron carbonitride (SiBCN) ceramic pressure sensorpiezoresistivityhigh temperature and harsh environment sensor |
| spellingShingle | Gang Shao Junpeng Jiang Mingjie Jiang Jie Su Wen Liu Hailong Wang Hongliang Xu Hongxia Lit Rui Zhang Polymer-derived SiBCN ceramic pressure sensor with excellent sensing performance Journal of Advanced Ceramics polymer-derived ceramics (PDCs) silicoboron carbonitride (SiBCN) ceramic pressure sensor piezoresistivity high temperature and harsh environment sensor |
| title | Polymer-derived SiBCN ceramic pressure sensor with excellent sensing performance |
| title_full | Polymer-derived SiBCN ceramic pressure sensor with excellent sensing performance |
| title_fullStr | Polymer-derived SiBCN ceramic pressure sensor with excellent sensing performance |
| title_full_unstemmed | Polymer-derived SiBCN ceramic pressure sensor with excellent sensing performance |
| title_short | Polymer-derived SiBCN ceramic pressure sensor with excellent sensing performance |
| title_sort | polymer derived sibcn ceramic pressure sensor with excellent sensing performance |
| topic | polymer-derived ceramics (PDCs) silicoboron carbonitride (SiBCN) ceramic pressure sensor piezoresistivity high temperature and harsh environment sensor |
| url | http://link.springer.com/article/10.1007/s40145-020-0377-6 |
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