Improving Thickness Uniformity of Amorphous Oxide Films Deposited on Large Substrates by Optical Flux Mapping
In this study, three amorphous oxide thin films are prepared by an electron beam evaporation combined with ion-assisted deposition technique. With the aid of optical flux mapping method, thin film thickness distribution with good uniformity can be obtained by appropriate coating masks. Three metal o...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-11-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/12/23/11878 |