Design and control of high-speed and large-range atomic force microscope

Design and control of high-speed and large-range atomic force microscope

Thesis: Ph. D., Massachusetts Institute of Technology, Department of Mechanical Engineering, 2015.

Bibliographic Details
Main Author: Soltani Bozchalooi, Iman, 1981-
Other Authors: Kamal Youcef-Toumi.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2015
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/100145

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