Design and control of high-speed and large-range atomic force microscope

Thesis: Ph. D., Massachusetts Institute of Technology, Department of Mechanical Engineering, 2015.

Bibliographic Details
Main Author:	Soltani Bozchalooi, Iman, 1981-
Other Authors:	Kamal Youcef-Toumi.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2015
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/100145

Internet

http://hdl.handle.net/1721.1/100145