Roadmap of mechanical systems design for the semiconductor automatic test equipment industry
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/10073 |
| _version_ | 1811097927573045248 |
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| author | Chiu, Michael Alec, 1968- |
| author2 | Alexander H. Slocum. |
| author_facet | Alexander H. Slocum. Chiu, Michael Alec, 1968- |
| author_sort | Chiu, Michael Alec, 1968- |
| collection | MIT |
| description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998. |
| first_indexed | 2024-09-23T17:07:11Z |
| format | Thesis |
| id | mit-1721.1/10073 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T17:07:11Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/100732019-04-13T00:08:22Z Roadmap of mechanical systems design for the semiconductor automatic test equipment industry Chiu, Michael Alec, 1968- Alexander H. Slocum. Massachusetts Institute of Technology. Dept. of Mechanical Engineering Mechanical Engineering Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998. Vita. Includes bibliographical references (p. 291-294). by Michael Alec Chiu. Ph.D. 2005-08-19T12:00:00Z 2005-08-19T12:00:00Z 1998 1998 Thesis http://hdl.handle.net/1721.1/10073 39241898 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 295 p. 20937933 bytes 20937689 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Mechanical Engineering Chiu, Michael Alec, 1968- Roadmap of mechanical systems design for the semiconductor automatic test equipment industry |
| title | Roadmap of mechanical systems design for the semiconductor automatic test equipment industry |
| title_full | Roadmap of mechanical systems design for the semiconductor automatic test equipment industry |
| title_fullStr | Roadmap of mechanical systems design for the semiconductor automatic test equipment industry |
| title_full_unstemmed | Roadmap of mechanical systems design for the semiconductor automatic test equipment industry |
| title_short | Roadmap of mechanical systems design for the semiconductor automatic test equipment industry |
| title_sort | roadmap of mechanical systems design for the semiconductor automatic test equipment industry |
| topic | Mechanical Engineering |
| url | http://hdl.handle.net/1721.1/10073 |
| work_keys_str_mv | AT chiumichaelalec1968 roadmapofmechanicalsystemsdesignforthesemiconductorautomatictestequipmentindustry |