Roadmap of mechanical systems design for the semiconductor automatic test equipment industry

Roadmap of mechanical systems design for the semiconductor automatic test equipment industry

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.

Bibliographic Details
Main Author: Chiu, Michael Alec, 1968-
Other Authors: Alexander H. Slocum.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Mechanical Engineering
Online Access:http://hdl.handle.net/1721.1/10073

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