Roadmap of mechanical systems design for the semiconductor automatic test equipment industry
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.
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| Format: | Abschlussarbeit |
| Sprache: | eng |
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Massachusetts Institute of Technology
2005
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| Online Zugang: | http://hdl.handle.net/1721.1/10073 |