Roadmap of mechanical systems design for the semiconductor automatic test equipment industry

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.

Bibliographic Details
Main Author:	Chiu, Michael Alec, 1968-
Other Authors:	Alexander H. Slocum.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Mechanical Engineering
Online Access:	http://hdl.handle.net/1721.1/10073

Internet

http://hdl.handle.net/1721.1/10073