Subcritical crack growth in polysilicon MEMS
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997.
| Main Author: | |
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| Other Authors: | |
| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/10439 |
| _version_ | 1826199990424305664 |
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| author | Van Arsdell, William W. (William Walker) |
| author2 | David M. Parks. |
| author_facet | David M. Parks. Van Arsdell, William W. (William Walker) |
| author_sort | Van Arsdell, William W. (William Walker) |
| collection | MIT |
| description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997. |
| first_indexed | 2024-09-23T11:29:24Z |
| format | Thesis |
| id | mit-1721.1/10439 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T11:29:24Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/104392019-04-10T11:27:37Z Subcritical crack growth in polysilicon MEMS Van Arsdell, William W. (William Walker) David M. Parks. Massachusetts Institute of Technology. Dept. of Mechanical Engineering Mechanical Engineering Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997. Includes bibliographical references. by Wiliam W. Van Arsdell. Ph.D. 2005-08-18T20:40:05Z 2005-08-18T20:40:05Z 1997 1997 Thesis http://hdl.handle.net/1721.1/10439 37639445 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 285 leaves 16540771 bytes 16540526 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Mechanical Engineering Van Arsdell, William W. (William Walker) Subcritical crack growth in polysilicon MEMS |
| title | Subcritical crack growth in polysilicon MEMS |
| title_full | Subcritical crack growth in polysilicon MEMS |
| title_fullStr | Subcritical crack growth in polysilicon MEMS |
| title_full_unstemmed | Subcritical crack growth in polysilicon MEMS |
| title_short | Subcritical crack growth in polysilicon MEMS |
| title_sort | subcritical crack growth in polysilicon mems |
| topic | Mechanical Engineering |
| url | http://hdl.handle.net/1721.1/10439 |
| work_keys_str_mv | AT vanarsdellwilliamwwilliamwalker subcriticalcrackgrowthinpolysiliconmems |