Subcritical crack growth in polysilicon MEMS

Subcritical crack growth in polysilicon MEMS

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997.

Bibliographic Details
Main Author: Van Arsdell, William W. (William Walker)
Other Authors: David M. Parks.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Mechanical Engineering
Online Access:http://hdl.handle.net/1721.1/10439

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