A sealed cavity thin-film acoustic resonator process for RF bandpass filters
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.
| Main Author: | |
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| Other Authors: | |
| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/10450 |
| _version_ | 1826204375908876288 |
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| author | Lutsky, Joseph J. (Joseph Joachim) |
| author2 | Charles G. Sodini. |
| author_facet | Charles G. Sodini. Lutsky, Joseph J. (Joseph Joachim) |
| author_sort | Lutsky, Joseph J. (Joseph Joachim) |
| collection | MIT |
| description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997. |
| first_indexed | 2024-09-23T12:53:44Z |
| format | Thesis |
| id | mit-1721.1/10450 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T12:53:44Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/104502019-04-12T14:13:31Z A sealed cavity thin-film acoustic resonator process for RF bandpass filters Lutsky, Joseph J. (Joseph Joachim) Charles G. Sodini. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997. Includes bibliographical references (p. 179-185). by Joseph J. Lutsky. Ph.D. 2005-08-18T20:45:40Z 2005-08-18T20:45:40Z 1997 1997 Thesis http://hdl.handle.net/1721.1/10450 37649729 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 199 p. 18418534 bytes 18418290 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science Lutsky, Joseph J. (Joseph Joachim) A sealed cavity thin-film acoustic resonator process for RF bandpass filters |
| title | A sealed cavity thin-film acoustic resonator process for RF bandpass filters |
| title_full | A sealed cavity thin-film acoustic resonator process for RF bandpass filters |
| title_fullStr | A sealed cavity thin-film acoustic resonator process for RF bandpass filters |
| title_full_unstemmed | A sealed cavity thin-film acoustic resonator process for RF bandpass filters |
| title_short | A sealed cavity thin-film acoustic resonator process for RF bandpass filters |
| title_sort | sealed cavity thin film acoustic resonator process for rf bandpass filters |
| topic | Electrical Engineering and Computer Science |
| url | http://hdl.handle.net/1721.1/10450 |
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