A sealed cavity thin-film acoustic resonator process for RF bandpass filters

A sealed cavity thin-film acoustic resonator process for RF bandpass filters

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.

Bibliographic Details
Main Author: Lutsky, Joseph J. (Joseph Joachim)
Other Authors: Charles G. Sodini.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Electrical Engineering and Computer Science
Online Access:http://hdl.handle.net/1721.1/10450

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