Electrostatic pull-in test structure design for in-situ mechanical property measurements of microelectromechanical systems (MEMS)
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/10454 |
| _version_ | 1826195301262688256 |
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| author | Gupta, Raj K., Ph. D. 1969- |
| author2 | Stephen D. Senturia. |
| author_facet | Stephen D. Senturia. Gupta, Raj K., Ph. D. 1969- |
| author_sort | Gupta, Raj K., Ph. D. 1969- |
| collection | MIT |
| description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997. |
| first_indexed | 2024-09-23T10:10:32Z |
| format | Thesis |
| id | mit-1721.1/10454 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T10:10:32Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/104542019-04-11T01:05:23Z Electrostatic pull-in test structure design for in-situ mechanical property measurements of microelectromechanical systems (MEMS) Gupta, Raj K., Ph. D. 1969- Stephen D. Senturia. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997. Includes bibliographical references (leaves 59-64). by Raj K. Gupta. Ph.D. 2005-08-18T20:47:37Z 2005-08-18T20:47:37Z 1997 1997 Thesis http://hdl.handle.net/1721.1/10454 37658953 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 68 leaves 6484705 bytes 6484465 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science Gupta, Raj K., Ph. D. 1969- Electrostatic pull-in test structure design for in-situ mechanical property measurements of microelectromechanical systems (MEMS) |
| title | Electrostatic pull-in test structure design for in-situ mechanical property measurements of microelectromechanical systems (MEMS) |
| title_full | Electrostatic pull-in test structure design for in-situ mechanical property measurements of microelectromechanical systems (MEMS) |
| title_fullStr | Electrostatic pull-in test structure design for in-situ mechanical property measurements of microelectromechanical systems (MEMS) |
| title_full_unstemmed | Electrostatic pull-in test structure design for in-situ mechanical property measurements of microelectromechanical systems (MEMS) |
| title_short | Electrostatic pull-in test structure design for in-situ mechanical property measurements of microelectromechanical systems (MEMS) |
| title_sort | electrostatic pull in test structure design for in situ mechanical property measurements of microelectromechanical systems mems |
| topic | Electrical Engineering and Computer Science |
| url | http://hdl.handle.net/1721.1/10454 |
| work_keys_str_mv | AT guptarajkphd1969 electrostaticpullinteststructuredesignforinsitumechanicalpropertymeasurementsofmicroelectromechanicalsystemsmems |