APA (7th ed.) Citation

Farhoud, M. S., & Smith, H. I. (2005). Interferometric lithography and selected applications. Massachusetts Institute of Technology.

Chicago Style (17th ed.) Citation

Farhoud, Maya S., and Henry I. Smith. Interferometric Lithography and Selected Applications. Massachusetts Institute of Technology, 2005.

MLA (9th ed.) Citation

Farhoud, Maya S., and Henry I. Smith. Interferometric Lithography and Selected Applications. Massachusetts Institute of Technology, 2005.

Warning: These citations may not always be 100% accurate.