Interferometric lithography and selected applications
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Thesis |
| Language: | eng |
| Published: |
Massachusetts Institute of Technology
2005
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/10457 |
| _version_ | 1811092431553167360 |
|---|---|
| author | Farhoud, Maya S. (Maya Sami) |
| author2 | Henry I. Smith. |
| author_facet | Henry I. Smith. Farhoud, Maya S. (Maya Sami) |
| author_sort | Farhoud, Maya S. (Maya Sami) |
| collection | MIT |
| description | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997. |
| first_indexed | 2024-09-23T15:18:04Z |
| format | Thesis |
| id | mit-1721.1/10457 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T15:18:04Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/104572019-04-11T13:57:43Z Interferometric lithography and selected applications Farhoud, Maya S. (Maya Sami) Henry I. Smith. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997. Includes bibliographical references (leaves 52-53). by Maya S. Fahoud. M.S. 2005-08-18T20:49:08Z 2005-08-18T20:49:08Z 1997 1997 Thesis http://hdl.handle.net/1721.1/10457 37658981 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 62 leaves 4596507 bytes 4596268 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science Farhoud, Maya S. (Maya Sami) Interferometric lithography and selected applications |
| title | Interferometric lithography and selected applications |
| title_full | Interferometric lithography and selected applications |
| title_fullStr | Interferometric lithography and selected applications |
| title_full_unstemmed | Interferometric lithography and selected applications |
| title_short | Interferometric lithography and selected applications |
| title_sort | interferometric lithography and selected applications |
| topic | Electrical Engineering and Computer Science |
| url | http://hdl.handle.net/1721.1/10457 |
| work_keys_str_mv | AT farhoudmayasmayasami interferometriclithographyandselectedapplications |