Fabrication of extremely smooth nanostructures using anisotropic etching
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/10459 |
| _version_ | 1826189378529001472 |
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| author | Franke, Andrea Elke |
| author2 | Henry I. Smith. |
| author_facet | Henry I. Smith. Franke, Andrea Elke |
| author_sort | Franke, Andrea Elke |
| collection | MIT |
| description | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997. |
| first_indexed | 2024-09-23T08:13:47Z |
| format | Thesis |
| id | mit-1721.1/10459 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T08:13:47Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/104592019-04-09T17:28:47Z Fabrication of extremely smooth nanostructures using anisotropic etching Franke, Andrea Elke Henry I. Smith. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997. Includes bibliographical references. by Andrea Elke Franke. M.S. 2005-08-18T20:50:24Z 2005-08-18T20:50:24Z 1997 1997 Thesis http://hdl.handle.net/1721.1/10459 37658985 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 70 leaves 6599953 bytes 6599711 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science Franke, Andrea Elke Fabrication of extremely smooth nanostructures using anisotropic etching |
| title | Fabrication of extremely smooth nanostructures using anisotropic etching |
| title_full | Fabrication of extremely smooth nanostructures using anisotropic etching |
| title_fullStr | Fabrication of extremely smooth nanostructures using anisotropic etching |
| title_full_unstemmed | Fabrication of extremely smooth nanostructures using anisotropic etching |
| title_short | Fabrication of extremely smooth nanostructures using anisotropic etching |
| title_sort | fabrication of extremely smooth nanostructures using anisotropic etching |
| topic | Electrical Engineering and Computer Science |
| url | http://hdl.handle.net/1721.1/10459 |
| work_keys_str_mv | AT frankeandreaelke fabricationofextremelysmoothnanostructuresusinganisotropicetching |