Fabrication of extremely smooth nanostructures using anisotropic etching

Fabrication of extremely smooth nanostructures using anisotropic etching

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.

Bibliographic Details
Main Author: Franke, Andrea Elke
Other Authors: Henry I. Smith.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Electrical Engineering and Computer Science
Online Access:http://hdl.handle.net/1721.1/10459

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