Micromachined infrared detector using wafer bonding technology
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/10579 |
| _version_ | 1811097264413736960 |
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| author | Devoto, Roberto J |
| author2 | Martin A. Schmidt. |
| author_facet | Martin A. Schmidt. Devoto, Roberto J |
| author_sort | Devoto, Roberto J |
| collection | MIT |
| description | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996. |
| first_indexed | 2024-09-23T16:56:43Z |
| format | Thesis |
| id | mit-1721.1/10579 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T16:56:43Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/105792019-04-12T21:55:10Z Micromachined infrared detector using wafer bonding technology Devoto, Roberto J Martin A. Schmidt. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996. Includes bibliographical references (p. 193-196). by Roberto J. Devoto. M.S. 2005-08-18T17:00:52Z 2005-08-18T17:00:52Z 1996 1996 Thesis http://hdl.handle.net/1721.1/10579 36057543 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 196 p. 19844126 bytes 19843881 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science Devoto, Roberto J Micromachined infrared detector using wafer bonding technology |
| title | Micromachined infrared detector using wafer bonding technology |
| title_full | Micromachined infrared detector using wafer bonding technology |
| title_fullStr | Micromachined infrared detector using wafer bonding technology |
| title_full_unstemmed | Micromachined infrared detector using wafer bonding technology |
| title_short | Micromachined infrared detector using wafer bonding technology |
| title_sort | micromachined infrared detector using wafer bonding technology |
| topic | Electrical Engineering and Computer Science |
| url | http://hdl.handle.net/1721.1/10579 |
| work_keys_str_mv | AT devotorobertoj micromachinedinfrareddetectorusingwaferbondingtechnology |