An architecture for flexible distributed experimentation and control with an AME 5000 plasma etcher
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996.
| Main Author: | |
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/10647 |
| _version_ | 1826208635616755712 |
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| author | Gower, Aaron E. (Aaron Elwood) |
| author2 | Duane S. Boning. |
| author_facet | Duane S. Boning. Gower, Aaron E. (Aaron Elwood) |
| author_sort | Gower, Aaron E. (Aaron Elwood) |
| collection | MIT |
| description | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996. |
| first_indexed | 2024-09-23T14:08:44Z |
| format | Thesis |
| id | mit-1721.1/10647 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T14:08:44Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/106472019-04-11T08:56:39Z An architecture for flexible distributed experimentation and control with an AME 5000 plasma etcher Gower, Aaron E. (Aaron Elwood) Duane S. Boning. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996. Includes bibliographical references (p. 72-74). by Aaron E. Gower. M.S. 2005-08-18T17:30:57Z 2005-08-18T17:30:57Z 1996 1996 Thesis http://hdl.handle.net/1721.1/10647 36270323 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 127 p. 7145147 bytes 7144904 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science Gower, Aaron E. (Aaron Elwood) An architecture for flexible distributed experimentation and control with an AME 5000 plasma etcher |
| title | An architecture for flexible distributed experimentation and control with an AME 5000 plasma etcher |
| title_full | An architecture for flexible distributed experimentation and control with an AME 5000 plasma etcher |
| title_fullStr | An architecture for flexible distributed experimentation and control with an AME 5000 plasma etcher |
| title_full_unstemmed | An architecture for flexible distributed experimentation and control with an AME 5000 plasma etcher |
| title_short | An architecture for flexible distributed experimentation and control with an AME 5000 plasma etcher |
| title_sort | architecture for flexible distributed experimentation and control with an ame 5000 plasma etcher |
| topic | Electrical Engineering and Computer Science |
| url | http://hdl.handle.net/1721.1/10647 |
| work_keys_str_mv | AT goweraaroneaaronelwood anarchitectureforflexibledistributedexperimentationandcontrolwithaname5000plasmaetcher AT goweraaroneaaronelwood architectureforflexibledistributedexperimentationandcontrolwithaname5000plasmaetcher |