An architecture for flexible distributed experimentation and control with an AME 5000 plasma etcher

An architecture for flexible distributed experimentation and control with an AME 5000 plasma etcher

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996.

Bibliographic Details
Main Author: Gower, Aaron E. (Aaron Elwood)
Other Authors: Duane S. Boning.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Electrical Engineering and Computer Science
Online Access:http://hdl.handle.net/1721.1/10647

Similar Items

Similar Items