Chemistry and physics of metallic contaminants on crystalline silicon surfaces

Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1996.

Bibliographic Details
Main Author: Norga, Gerd Johan Maria
Other Authors: Lionel G. Kimerling.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Online Access:http://hdl.handle.net/1721.1/10904