Electrostatically actuated microelectromechanical test structures for material property measurement

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.

Bibliographic Details
Main Author:	Osterberg, Peter Maynard
Other Authors:	Stephen D. Senturia.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Electrical Engineering and Computer Science
Online Access:	http://hdl.handle.net/1721.1/11097

Internet

http://hdl.handle.net/1721.1/11097