Remote microscope for inspection of integrated circuits
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/11118 |
| _version_ | 1826188820964442112 |
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| author | Kao, James T. (James Ting Yu) |
| author2 | Donald E. Troxel. |
| author_facet | Donald E. Troxel. Kao, James T. (James Ting Yu) |
| author_sort | Kao, James T. (James Ting Yu) |
| collection | MIT |
| description | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995. |
| first_indexed | 2024-09-23T08:05:13Z |
| format | Thesis |
| id | mit-1721.1/11118 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T08:05:13Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/111182022-01-13T07:54:29Z Remote microscope for inspection of integrated circuits Kao, James T. (James Ting Yu) Donald E. Troxel. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995. Includes bibliographical references (p. 107-108). by James T. Kao. M.S. 2005-08-17T23:31:51Z 2005-08-17T23:31:51Z 1995 1995 Thesis http://hdl.handle.net/1721.1/11118 34188746 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 114 p. 8145446 bytes 8145205 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science Kao, James T. (James Ting Yu) Remote microscope for inspection of integrated circuits |
| title | Remote microscope for inspection of integrated circuits |
| title_full | Remote microscope for inspection of integrated circuits |
| title_fullStr | Remote microscope for inspection of integrated circuits |
| title_full_unstemmed | Remote microscope for inspection of integrated circuits |
| title_short | Remote microscope for inspection of integrated circuits |
| title_sort | remote microscope for inspection of integrated circuits |
| topic | Electrical Engineering and Computer Science |
| url | http://hdl.handle.net/1721.1/11118 |
| work_keys_str_mv | AT kaojamestjamestingyu remotemicroscopeforinspectionofintegratedcircuits |