Remote microscope for inspection of integrated circuits

Remote microscope for inspection of integrated circuits

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.

Bibliographic Details
Main Author:	Kao, James T. (James Ting Yu)
Other Authors:	Donald E. Troxel.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Electrical Engineering and Computer Science
Online Access:	http://hdl.handle.net/1721.1/11118

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