Feedback control of organometallic vapor-phase epitaxial growth of aluminum gallium arsenide devices

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.

Bibliographic Details
Main Author: Warnick, Sean C. (Sean Charles)
Other Authors: Munther A. Dahleh.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Online Access:http://hdl.handle.net/1721.1/11150
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author Warnick, Sean C. (Sean Charles)
author2 Munther A. Dahleh.
author_facet Munther A. Dahleh.
Warnick, Sean C. (Sean Charles)
author_sort Warnick, Sean C. (Sean Charles)
collection MIT
description Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.
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language eng
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spelling mit-1721.1/111502019-04-10T14:45:15Z Feedback control of organometallic vapor-phase epitaxial growth of aluminum gallium arsenide devices Warnick, Sean C. (Sean Charles) Munther A. Dahleh. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995. Includes bibliographical references (leaves 67-69). by Sean C. Warnick. M.S. 2005-08-17T23:45:34Z 2005-08-17T23:45:34Z 1995 1995 Thesis http://hdl.handle.net/1721.1/11150 34314790 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 69 leaves 4475456 bytes 4475214 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology
spellingShingle Electrical Engineering and Computer Science
Warnick, Sean C. (Sean Charles)
Feedback control of organometallic vapor-phase epitaxial growth of aluminum gallium arsenide devices
title Feedback control of organometallic vapor-phase epitaxial growth of aluminum gallium arsenide devices
title_full Feedback control of organometallic vapor-phase epitaxial growth of aluminum gallium arsenide devices
title_fullStr Feedback control of organometallic vapor-phase epitaxial growth of aluminum gallium arsenide devices
title_full_unstemmed Feedback control of organometallic vapor-phase epitaxial growth of aluminum gallium arsenide devices
title_short Feedback control of organometallic vapor-phase epitaxial growth of aluminum gallium arsenide devices
title_sort feedback control of organometallic vapor phase epitaxial growth of aluminum gallium arsenide devices
topic Electrical Engineering and Computer Science
url http://hdl.handle.net/1721.1/11150
work_keys_str_mv AT warnickseancseancharles feedbackcontroloforganometallicvaporphaseepitaxialgrowthofaluminumgalliumarsenidedevices