Feedback control of organometallic vapor-phase epitaxial growth of aluminum gallium arsenide devices

Feedback control of organometallic vapor-phase epitaxial growth of aluminum gallium arsenide devices

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.

Bibliographic Details
Main Author: Warnick, Sean C. (Sean Charles)
Other Authors: Munther A. Dahleh.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Electrical Engineering and Computer Science
Online Access:http://hdl.handle.net/1721.1/11150

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