Catalyst Self-Assembly for Scalable Patterning of Sub 10 nm Ultrahigh Aspect Ratio Nanopores in Silicon
Nanoporous silicon (NPSi) has received significant attention for its potential to contribute to a large number of applications, but has not yet been extensively implemented because of the inability of current state-of-the-art nanofabrication techniques to achieve sufficiently small pore size, high a...
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| Format: | Article |
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American Chemical Society (ACS)
2017
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| Online Access: | http://hdl.handle.net/1721.1/111825 https://orcid.org/0000-0001-5255-6957 https://orcid.org/0000-0003-4148-2424 https://orcid.org/0000-0003-1281-2359 |