Design and control optimization for high-speed jumping mode Atomic Force Microscope

Thesis: S.M., Massachusetts Institute of Technology, Department of Mechanical Engineering, 2017.

Bibliographic Details
Main Author: Xia, Fangzhou
Other Authors: Kamal Youcef-Toumi.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2017
Subjects:
Online Access:http://hdl.handle.net/1721.1/111897