A new high precision positon measurement system

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995.

Bibliographic Details
Main Author:	Ohara, Tetsuo
Other Authors:	Kamal Youcef-Toumi.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Mechanical Engineering
Online Access:	http://hdl.handle.net/1721.1/11258

Internet

http://hdl.handle.net/1721.1/11258