Characterization of perfluorocompound emission and abatement kinetics in plasma processes
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1996.
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| Other Authors: | |
| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/11264 |
| _version_ | 1826209103640264704 |
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| author | Mohindra, Vivek |
| author2 | Herbert H. Swain. |
| author_facet | Herbert H. Swain. Mohindra, Vivek |
| author_sort | Mohindra, Vivek |
| collection | MIT |
| description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1996. |
| first_indexed | 2024-09-23T14:17:37Z |
| format | Thesis |
| id | mit-1721.1/11264 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T14:17:37Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/112642019-04-11T05:13:05Z Characterization of perfluorocompound emission and abatement kinetics in plasma processes Mohindra, Vivek Herbert H. Swain. Massachusetts Institute of Technology. Dept. of Chemical Engineering Chemical Engineering Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1996. Includes bibliographical references (leaves 136-142). by Vivek Mohindra. Ph.D. 2005-08-18T12:00:00Z 2005-08-18T12:00:00Z 1996 1996 Thesis http://hdl.handle.net/1721.1/11264 34791354 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 188 leaves 12324346 bytes 12324104 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Chemical Engineering Mohindra, Vivek Characterization of perfluorocompound emission and abatement kinetics in plasma processes |
| title | Characterization of perfluorocompound emission and abatement kinetics in plasma processes |
| title_full | Characterization of perfluorocompound emission and abatement kinetics in plasma processes |
| title_fullStr | Characterization of perfluorocompound emission and abatement kinetics in plasma processes |
| title_full_unstemmed | Characterization of perfluorocompound emission and abatement kinetics in plasma processes |
| title_short | Characterization of perfluorocompound emission and abatement kinetics in plasma processes |
| title_sort | characterization of perfluorocompound emission and abatement kinetics in plasma processes |
| topic | Chemical Engineering |
| url | http://hdl.handle.net/1721.1/11264 |
| work_keys_str_mv | AT mohindravivek characterizationofperfluorocompoundemissionandabatementkineticsinplasmaprocesses |