Characterization of perfluorocompound emission and abatement kinetics in plasma processes

Characterization of perfluorocompound emission and abatement kinetics in plasma processes

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1996.

Bibliographic Details
Main Author:	Mohindra, Vivek
Other Authors:	Herbert H. Swain.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Chemical Engineering
Online Access:	http://hdl.handle.net/1721.1/11264

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