A nanofabricated, monolithic, path-separated electron interferometer

Progress in nanofabrication technology has enabled the development of numerous electron optic elements for enhancing image contrast and manipulating electron wave functions. Here, we describe a modular, self-aligned, amplitude-division electron interferometer in a conventional transmission electron...

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Main Authors: Dyck, Dirk van, Agarwal, Akshay, Kim, Chungsoo, Hobbs, Richard, Berggren, Karl K
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Published: Nature Publishing Group 2017
Online Access:http://hdl.handle.net/1721.1/112709
https://orcid.org/0000-0002-5944-3346
https://orcid.org/0000-0002-8547-0639
https://orcid.org/0000-0003-0855-3710
https://orcid.org/0000-0001-7453-9031
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author Dyck, Dirk van
Agarwal, Akshay
Kim, Chungsoo
Hobbs, Richard
Berggren, Karl K
author2 Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
author_facet Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Dyck, Dirk van
Agarwal, Akshay
Kim, Chungsoo
Hobbs, Richard
Berggren, Karl K
author_sort Dyck, Dirk van
collection MIT
description Progress in nanofabrication technology has enabled the development of numerous electron optic elements for enhancing image contrast and manipulating electron wave functions. Here, we describe a modular, self-aligned, amplitude-division electron interferometer in a conventional transmission electron microscope. The interferometer consists of two 45-nm-thick silicon layers separated by 20 μm. This interferometer is fabricated from a single-crystal silicon cantilever on a transmission electron microscope grid by gallium focused-ion-beam milling. Using this interferometer, we obtain interference fringes in a Mach-Zehnder geometry in an unmodified 200 kV transmission electron microscope. The fringes have a period of 0.32 nm, which corresponds to the [111] lattice planes of silicon, and a maximum contrast of 15%. We use convergent-beam electron diffraction to quantify grating alignment and coherence. This design can potentially be scaled to millimeter-scale, and used in electron holography. It could also be applied to perform fundamental physics experiments, such as interaction-free measurement with electrons.
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spelling mit-1721.1/1127092022-10-01T06:02:56Z A nanofabricated, monolithic, path-separated electron interferometer Dyck, Dirk van Agarwal, Akshay Kim, Chungsoo Hobbs, Richard Berggren, Karl K Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Agarwal, Akshay Kim, Chungsoo Hobbs, Richard Berggren, Karl K Progress in nanofabrication technology has enabled the development of numerous electron optic elements for enhancing image contrast and manipulating electron wave functions. Here, we describe a modular, self-aligned, amplitude-division electron interferometer in a conventional transmission electron microscope. The interferometer consists of two 45-nm-thick silicon layers separated by 20 μm. This interferometer is fabricated from a single-crystal silicon cantilever on a transmission electron microscope grid by gallium focused-ion-beam milling. Using this interferometer, we obtain interference fringes in a Mach-Zehnder geometry in an unmodified 200 kV transmission electron microscope. The fringes have a period of 0.32 nm, which corresponds to the [111] lattice planes of silicon, and a maximum contrast of 15%. We use convergent-beam electron diffraction to quantify grating alignment and coherence. This design can potentially be scaled to millimeter-scale, and used in electron holography. It could also be applied to perform fundamental physics experiments, such as interaction-free measurement with electrons. 2017-12-12T15:48:45Z 2017-12-12T15:48:45Z 2017-05 2016-12 2017-12-11T17:11:57Z Article http://purl.org/eprint/type/JournalArticle 2045-2322 http://hdl.handle.net/1721.1/112709 Agarwal, Akshay et al. "A nanofabricated, monolithic, path-separated electron interferometer." Scientific Reports 7, 1 (May 2017): 1677 © 2017 The Author(s) https://orcid.org/0000-0002-5944-3346 https://orcid.org/0000-0002-8547-0639 https://orcid.org/0000-0003-0855-3710 https://orcid.org/0000-0001-7453-9031 http://dx.doi.org/10.1038/s41598-017-01466-0 Scientific Reports Creative Commons Attribution 4.0 International https://creativecommons.org/licenses/by/4.0/ application/pdf Nature Publishing Group Nature
spellingShingle Dyck, Dirk van
Agarwal, Akshay
Kim, Chungsoo
Hobbs, Richard
Berggren, Karl K
A nanofabricated, monolithic, path-separated electron interferometer
title A nanofabricated, monolithic, path-separated electron interferometer
title_full A nanofabricated, monolithic, path-separated electron interferometer
title_fullStr A nanofabricated, monolithic, path-separated electron interferometer
title_full_unstemmed A nanofabricated, monolithic, path-separated electron interferometer
title_short A nanofabricated, monolithic, path-separated electron interferometer
title_sort nanofabricated monolithic path separated electron interferometer
url http://hdl.handle.net/1721.1/112709
https://orcid.org/0000-0002-5944-3346
https://orcid.org/0000-0002-8547-0639
https://orcid.org/0000-0003-0855-3710
https://orcid.org/0000-0001-7453-9031
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