Electrostrictive microelectromechanical fibres and textiles
Microelectromechanical systems (MEMS) enable many modern-day technologies, including actuators, motion sensors, drug delivery systems, projection displays, etc. Currently, MEMS fabrication techniques are primarily based on silicon micromachining processes, resulting in rigid and low aspect ratio str...
Main Authors: | Khudiyev, Tural, Clayton, Jefferson Daniel, Levy, Etgar Claude, Chocat, Noemie, Gumennik, Alexander, Joannopoulos, John, Fink, Yoel, Stolyarov, Alexander Mark |
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Other Authors: | Massachusetts Institute of Technology. Institute for Soldier Nanotechnologies |
Format: | Article |
Published: |
Nature Publishing Group
2017
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Online Access: | http://hdl.handle.net/1721.1/112736 https://orcid.org/0000-0002-6060-7643 https://orcid.org/0000-0002-7973-1716 https://orcid.org/0000-0002-3994-4047 https://orcid.org/0000-0002-7244-3682 https://orcid.org/0000-0001-9752-2283 |
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