Annealing behaviors of vacancy-type defects near interfaces between metal contacts and GaN probed using a monoenergetic positron beam

Vacancy-type defects near interfaces between metal contacts and GaN grown on Si substrates by metal organic chemical vapor deposition have been studied using a monoenergetic positron beam. Measurements of Doppler broadening spectra of the annihilation radiation for Ti-deposited GaN showed that optic...

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Main Authors: Uedono, Akira, Fujishima, Tatsuya, Piedra, Daniel, Yoshihara, Nakaaki, Ishibashi, Shoji, Sumiya, Masatomo, Laboutin, Oleg, Johnson, Wayne, Palacios, Tomás
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:en_US
Published: American Institute of Physics (AIP) 2018
Online Access:http://hdl.handle.net/1721.1/114247
https://orcid.org/0000-0002-8104-9097
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author Uedono, Akira
Fujishima, Tatsuya
Piedra, Daniel
Yoshihara, Nakaaki
Ishibashi, Shoji
Sumiya, Masatomo
Laboutin, Oleg
Johnson, Wayne
Palacios, Tomás
author2 Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
author_facet Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Uedono, Akira
Fujishima, Tatsuya
Piedra, Daniel
Yoshihara, Nakaaki
Ishibashi, Shoji
Sumiya, Masatomo
Laboutin, Oleg
Johnson, Wayne
Palacios, Tomás
author_sort Uedono, Akira
collection MIT
description Vacancy-type defects near interfaces between metal contacts and GaN grown on Si substrates by metal organic chemical vapor deposition have been studied using a monoenergetic positron beam. Measurements of Doppler broadening spectra of the annihilation radiation for Ti-deposited GaN showed that optically active vacancy-type defects were introduced below the Ti/GaN interface after annealing at 800 °C. Charge transition of those defects due to electron capture was observed and was found to correlate with a yellow band in the photoluminescence spectrum. The major defect species was identified as vacancy clusters such as three to five Ga-vacancies coupled with multiple nitrogen-vacancies. The annealing behaviors of vacancy-type defects in Ti-, Ni-, and Pt-deposited GaN were also examined.
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spelling mit-1721.1/1142472022-10-01T11:28:24Z Annealing behaviors of vacancy-type defects near interfaces between metal contacts and GaN probed using a monoenergetic positron beam Uedono, Akira Fujishima, Tatsuya Piedra, Daniel Yoshihara, Nakaaki Ishibashi, Shoji Sumiya, Masatomo Laboutin, Oleg Johnson, Wayne Palacios, Tomás Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Massachusetts Institute of Technology. Microsystems Technology Laboratories Palacios, Tomas Fujishima, Tatsuya Piedra, Daniel Vacancy-type defects near interfaces between metal contacts and GaN grown on Si substrates by metal organic chemical vapor deposition have been studied using a monoenergetic positron beam. Measurements of Doppler broadening spectra of the annihilation radiation for Ti-deposited GaN showed that optically active vacancy-type defects were introduced below the Ti/GaN interface after annealing at 800 °C. Charge transition of those defects due to electron capture was observed and was found to correlate with a yellow band in the photoluminescence spectrum. The major defect species was identified as vacancy clusters such as three to five Ga-vacancies coupled with multiple nitrogen-vacancies. The annealing behaviors of vacancy-type defects in Ti-, Ni-, and Pt-deposited GaN were also examined. 2018-03-21T15:37:04Z 2018-03-21T15:37:04Z 2014-08 2014-06 Article http://purl.org/eprint/type/JournalArticle 0003-6951 1077-3118 http://hdl.handle.net/1721.1/114247 Uedono, Akira et al. “Annealing Behaviors of Vacancy-Type Defects Near Interfaces Between Metal Contacts and GaN Probed Using a Monoenergetic Positron Beam.” Applied Physics Letters 105, 5 (August 2014): 052108 © AIP Publishing LLC https://orcid.org/0000-0002-8104-9097 en_US https://doi.org/10.1063/1.4892834 Applied Physics Letters Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf American Institute of Physics (AIP) Baylon
spellingShingle Uedono, Akira
Fujishima, Tatsuya
Piedra, Daniel
Yoshihara, Nakaaki
Ishibashi, Shoji
Sumiya, Masatomo
Laboutin, Oleg
Johnson, Wayne
Palacios, Tomás
Annealing behaviors of vacancy-type defects near interfaces between metal contacts and GaN probed using a monoenergetic positron beam
title Annealing behaviors of vacancy-type defects near interfaces between metal contacts and GaN probed using a monoenergetic positron beam
title_full Annealing behaviors of vacancy-type defects near interfaces between metal contacts and GaN probed using a monoenergetic positron beam
title_fullStr Annealing behaviors of vacancy-type defects near interfaces between metal contacts and GaN probed using a monoenergetic positron beam
title_full_unstemmed Annealing behaviors of vacancy-type defects near interfaces between metal contacts and GaN probed using a monoenergetic positron beam
title_short Annealing behaviors of vacancy-type defects near interfaces between metal contacts and GaN probed using a monoenergetic positron beam
title_sort annealing behaviors of vacancy type defects near interfaces between metal contacts and gan probed using a monoenergetic positron beam
url http://hdl.handle.net/1721.1/114247
https://orcid.org/0000-0002-8104-9097
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