Free-standing 100 nm period gratings produced by achromatic holographic lithography
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.
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Format: | Thesis |
Language: | eng |
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Massachusetts Institute of Technology
2005
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Online Access: | http://hdl.handle.net/1721.1/11466 |
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author | Shah, Satyen N. (Satyen Navin) |
author2 | Henry I. Smith. |
author_facet | Henry I. Smith. Shah, Satyen N. (Satyen Navin) |
author_sort | Shah, Satyen N. (Satyen Navin) |
collection | MIT |
description | Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995. |
first_indexed | 2024-09-23T13:53:58Z |
format | Thesis |
id | mit-1721.1/11466 |
institution | Massachusetts Institute of Technology |
language | eng |
last_indexed | 2024-09-23T13:53:58Z |
publishDate | 2005 |
publisher | Massachusetts Institute of Technology |
record_format | dspace |
spelling | mit-1721.1/114662019-04-12T21:55:28Z Free-standing 100 nm period gratings produced by achromatic holographic lithography Shah, Satyen N. (Satyen Navin) Henry I. Smith. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995. Includes bibliographical references (leaf 44). by Satyen N. Shah. M.Eng. 2005-08-17T18:48:25Z 2005-08-17T18:48:25Z 1995 1995 Thesis http://hdl.handle.net/1721.1/11466 33351689 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 44 leaves 2918364 bytes 2918124 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
spellingShingle | Electrical Engineering and Computer Science Shah, Satyen N. (Satyen Navin) Free-standing 100 nm period gratings produced by achromatic holographic lithography |
title | Free-standing 100 nm period gratings produced by achromatic holographic lithography |
title_full | Free-standing 100 nm period gratings produced by achromatic holographic lithography |
title_fullStr | Free-standing 100 nm period gratings produced by achromatic holographic lithography |
title_full_unstemmed | Free-standing 100 nm period gratings produced by achromatic holographic lithography |
title_short | Free-standing 100 nm period gratings produced by achromatic holographic lithography |
title_sort | free standing 100 nm period gratings produced by achromatic holographic lithography |
topic | Electrical Engineering and Computer Science |
url | http://hdl.handle.net/1721.1/11466 |
work_keys_str_mv | AT shahsatyennsatyennavin freestanding100nmperiodgratingsproducedbyachromaticholographiclithography |