Free-standing 100 nm period gratings produced by achromatic holographic lithography

Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.

Bibliographic Details
Main Author: Shah, Satyen N. (Satyen Navin)
Other Authors: Henry I. Smith.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Online Access:http://hdl.handle.net/1721.1/11466
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author Shah, Satyen N. (Satyen Navin)
author2 Henry I. Smith.
author_facet Henry I. Smith.
Shah, Satyen N. (Satyen Navin)
author_sort Shah, Satyen N. (Satyen Navin)
collection MIT
description Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.
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spelling mit-1721.1/114662019-04-12T21:55:28Z Free-standing 100 nm period gratings produced by achromatic holographic lithography Shah, Satyen N. (Satyen Navin) Henry I. Smith. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995. Includes bibliographical references (leaf 44). by Satyen N. Shah. M.Eng. 2005-08-17T18:48:25Z 2005-08-17T18:48:25Z 1995 1995 Thesis http://hdl.handle.net/1721.1/11466 33351689 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 44 leaves 2918364 bytes 2918124 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology
spellingShingle Electrical Engineering and Computer Science
Shah, Satyen N. (Satyen Navin)
Free-standing 100 nm period gratings produced by achromatic holographic lithography
title Free-standing 100 nm period gratings produced by achromatic holographic lithography
title_full Free-standing 100 nm period gratings produced by achromatic holographic lithography
title_fullStr Free-standing 100 nm period gratings produced by achromatic holographic lithography
title_full_unstemmed Free-standing 100 nm period gratings produced by achromatic holographic lithography
title_short Free-standing 100 nm period gratings produced by achromatic holographic lithography
title_sort free standing 100 nm period gratings produced by achromatic holographic lithography
topic Electrical Engineering and Computer Science
url http://hdl.handle.net/1721.1/11466
work_keys_str_mv AT shahsatyennsatyennavin freestanding100nmperiodgratingsproducedbyachromaticholographiclithography