Free-standing 100 nm period gratings produced by achromatic holographic lithography

Free-standing 100 nm period gratings produced by achromatic holographic lithography

Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.

Bibliographic Details
Main Author: Shah, Satyen N. (Satyen Navin)
Other Authors: Henry I. Smith.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Electrical Engineering and Computer Science
Online Access:http://hdl.handle.net/1721.1/11466

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